Cathode sputtering (Plating process)
Overview
| Works: | 5 works in 2 publications in 2 languages | |
|---|---|---|
Titles
Vacuum technology, thin films, and sputtering : = an introduction /
by:
(Language materials, printed)
Handbook of sputter deposition technology = fundamentals and applications for functional thin films, nano-materials and MEMS /
by:
(Electronic resources)
Thin film materials technology DUP_1 = sputtering of compound materials /
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(Electronic resources)