鑭鋇錫氧

利用磁控濺鍍BaSnO3摻雜不同比例的La在藍寶石基板上並觀察薄膜及分析顯微結構 = = Using magnetron sputtering BaSnO3 doped with different proportions of La on the sapphire substrate and observe the thin film and analyze the microstructure / by: (Language materials, printed)

研究以磁控濺鍍法成長含鑭摻雜之鋇錫氧薄膜以追求高平整度之退火條件 = = Study on the annealing conditions for growing La-doped BaSnO3 thin films by magnetron sputtering in pursuit of high flatness / by: (Language materials, printed)

La-doped

鑭濃度

LBSO

annealing

magnetron sputtering

平整度

La concentration

flatness

鑭摻雜

退火

鑭鋇錫氧

磁控濺鍍

BaSnO3