Sputtering (Physics)

Thin-film and depth-profile analysis / by: (Language materials, printed)

Glow discharge processes : = sputtering and plasma etching / by: (Language materials, printed)

Sputtering materials for VLSI and thin film devices by: (Electronic resources)

Plasma etching.

Flat panel displays- Materials.

Sputtering (Physics)

Microelectronics- Materials.

Surface chemistry.

Glow discharges.

Thin films- Surfaces.