Epitaxy.
Overview
| Works: | 10 works in 5 publications in 5 languages | |
|---|---|---|
Titles
Current issues in heteroepitaxial growth--stress relaxation and self assembly /
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(Language materials, printed)
Investigation on SiGe selective epitaxy for source and drain engineering in 22 nm CMOS technology node and beyond
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(Electronic resources)
Epitaxy of semiconductors = physics and fabrication of heterostructures /
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(Electronic resources)
Quasi van der waals epitaxy of nitride semiconductor and its applications
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(Electronic resources)
Atomic layer deposition = principles, characteristics, and nanotechnology applications /
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(Electronic resources)
Subjects