Microelectromechanical systems.

Overview
Works: 97 works in 38 publications in 38 languages
Titles
MEMS mechanical sensors by: (Electronic resources)
Principles and applications of NanoMEMS physics / by: (Language materials, printed)
Micromechatronics / by: (Language materials, printed)
Introduction to microfabrication / by: (Language materials, printed)
Photonic microresonator research and applications by: (Language materials, printed)
Radioisotope thin-film powered microsystems by: (Language materials, printed)
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