沉積溫度

氧化鋁鈍化層之沉積溫度與熱退火條件對少數載子壽命影響 = = Effect of deposition temperature and thermal annealing conditions of aluminum oxide passivation layer on minority carrier lifetime / by: (Language materials, printed)

鈍化層

表面鈍化

負固定電荷

negative fixed charge

氧化鋁

原子層沉積

passivation layer

aluminum oxide

沉積溫度

deposition temperature

surface passivation

atomic layer deposition