Microtechnology and MEMS,

書目資訊

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thermal transport for applications i...

thermal transport for applications in micro/nanomachining

integrated chemical microsensor syst...

integrated chemical microsensor systems in cmos technology

force sensors for microelectronic pa...

force sensors for microelectronic packaging applications

ccd image sensors in deep-ultraviolet

electromechanical systems in microte...

electromechanical systems in microtechnology and mechatronics

design and manufacturing of active m...

design and manufacturing of active microsystems

engineering of micro/nano biosystems

piezo-electric electro-acoustic tran...

piezo-electric electro-acoustic transducers

piezotronics and piezo-phototronics