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Introductory MEMS = fabrication and ...

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Layton, Richard A.

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Introductory MEMS = fabrication and applications /

紀錄類型:	書目-語言資料,印刷品 : Monograph/item
正題名/作者:	Introductory MEMS/ by Thomas M. Adams, Richard A. Layton.
其他題名:	fabrication and applications /
作者:	Adams, Thomas M.
其他作者:	Layton, Richard A.
出版者:	Boston, MA :Springer Science+Business Media, LLC, : 2010.,
面頁冊數:	xv, 444 p. :ill. (some col.), digital ;25 cm.
Contained By:	Springer eBooks
標題:	Electronic apparatus and appliances. -
電子資源:	http://dx.doi.org/10.1007/978-0-387-09511-0
ISBN:	9780387095103 (paper)

Introductory MEMS = fabrication and applications /
Adams, Thomas M.

Introductory MEMSfabrication and applications /[electronic resource] :by Thomas M. Adams, Richard A. Layton. - Boston, MA :Springer Science+Business Media, LLC,2010. - xv, 444 p. :ill. (some col.), digital ;25 cm.

ISBN: 9780387095103 (paper)Subjects--Topical Terms:

526237
Electronic apparatus and appliances.

LC Class. No.: TK7875 / .A33 2010

Dewey Class. No.: 621.381

Introductory MEMS = fabrication and applications /
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020 $a 9780387095110 (electronic bk.)
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300 $a xv, 444 p. : $b ill. (some col.), digital ; $c 25 cm.
650 0 $a Electronic apparatus and appliances. $3 526237
650 0 $a Microelectromechanical systems. $3 567138
650 0 $a Transducers. $3 1086134
650 1 4 $a Engineering. $3 586835
650 2 4 $a Circuits and Systems. $3 896527
650 2 4 $a Continuum Mechanics and Mechanics of Materials. $3 890989
650 2 4 $a Electronics and Microelectronics, Instrumentation. $3 893838
650 2 4 $a Mechanics. $3 525881
650 2 4 $a Surfaces and Interfaces, Thin Films. $3 892408
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