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[ subject:"Plasma engineering." ]
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Plasma processing of materials = sci...
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Plasma processing of materials = scientific opportunities and technological challenges/
紀錄類型:
書目-電子資源 : Monograph/item
正題名/作者:
Plasma processing of materials/ Panel on Plasma Processing of Materials, Plasma Science Committee, Board on Physics and Astronomy, Commission on Physical Sciences, Mathematics, and Applications, National Research Council.
其他題名:
scientific opportunities and technological challenges/
團體作者:
National Research Council (U.S.).
出版者:
Washington, D.C. :National Academy Press, : 1991.,
面頁冊數:
xii, 75 p. :ill. ;28 cm.
標題:
Microelectronics - Materials -
電子資源:
http://www.netlibrary.com/urlapi.asp?action=summary&v=1&bookid=14049An electronic book accessible through the World Wide Web; click for information
ISBN:
0585084637 (electronic bk.)
Plasma processing of materials = scientific opportunities and technological challenges/
National Research Council (U.S.).Panel on Plasma Processing of Materials.
Plasma processing of materials
scientific opportunities and technological challenges/[electronic resource] :Panel on Plasma Processing of Materials, Plasma Science Committee, Board on Physics and Astronomy, Commission on Physical Sciences, Mathematics, and Applications, National Research Council. - Washington, D.C. :National Academy Press,1991. - xii, 75 p. :ill. ;28 cm.
Electronic reproduction.
Boulder, Colo. :
NetLibrary,
2000.
Available via the World Wide Web.
ISBN: 0585084637 (electronic bk.)Subjects--Topical Terms:
770528
Microelectronics
--MaterialsIndex Terms--Genre/Form:
542853
Electronic books.
LC Class. No.: TA2005 / .N37 1991eb
Dewey Class. No.: 621.044
Plasma processing of materials = scientific opportunities and technological challenges/
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