語系:
繁體中文
English
說明(常見問題)
回圖書館首頁
手機版館藏查詢
登入
回首頁
到查詢結果
[ subject:"Plasma engineering." ]
切換:
標籤
|
MARC模式
|
ISBD
Feature profile evolution in plasma ...
~
Samukawa, Seiji.
FindBook
Google Book
Amazon
博客來
Feature profile evolution in plasma processing using on-wafer monitoring system
紀錄類型:
書目-電子資源 : Monograph/item
正題名/作者:
Feature profile evolution in plasma processing using on-wafer monitoring system/ by Seiji Samukawa.
作者:
Samukawa, Seiji.
出版者:
Tokyo :Springer Japan : : 2014.,
面頁冊數:
viii, 40 p. :ill., digital ;24 cm.
Contained By:
Springer eBooks
標題:
Plasma engineering. -
電子資源:
http://dx.doi.org/10.1007/978-4-431-54795-2
ISBN:
9784431547952 (electronic bk.)
Feature profile evolution in plasma processing using on-wafer monitoring system
Samukawa, Seiji.
Feature profile evolution in plasma processing using on-wafer monitoring system
[electronic resource] /by Seiji Samukawa. - Tokyo :Springer Japan :2014. - viii, 40 p. :ill., digital ;24 cm. - SpringerBriefs in applied sciences and technology,2191-530X. - SpringerBriefs in applied sciences and technology..
ISBN: 9784431547952 (electronic bk.)Subjects--Topical Terms:
674159
Plasma engineering.
Dewey Class. No.: 621.044
Feature profile evolution in plasma processing using on-wafer monitoring system
LDR
:00854nmm a2200253 a 4500
001
1936772
003
DE-He213
005
20140721171844.0
006
m d
007
cr nn 008maaau
008
140915s2014 ja s 0 eng d
020
$a
9784431547952 (electronic bk.)
020
$a
9784431547945 (paper)
035
$a
978-4-431-54795-2
040
$a
GP
$c
GP
041
0
$a
eng
082
0 4
$a
621.044
$2
23
090
$a
TA2020
$b
.S193 2014
100
1
$a
Samukawa, Seiji.
$3
2058283
245
1 0
$a
Feature profile evolution in plasma processing using on-wafer monitoring system
$h
[electronic resource] /
$c
by Seiji Samukawa.
260
$a
Tokyo :
$b
Springer Japan :
$b
Imprint: Springer,
$c
2014.
300
$a
viii, 40 p. :
$b
ill., digital ;
$c
24 cm.
490
1
$a
SpringerBriefs in applied sciences and technology,
$x
2191-530X
650
0
$a
Plasma engineering.
$3
674159
650
0
$a
Plasma etching.
$3
712111
650
1 4
$a
Engineering.
$3
586835
650
2 4
$a
Nanotechnology and Microengineering.
$3
1005737
650
2 4
$a
Nanoscale Science and Technology.
$3
1244861
650
2 4
$a
Nanotechnology.
$3
526235
650
2 4
$a
Plasma Physics.
$3
1074160
650
2 4
$a
Semiconductors.
$3
516162
710
2
$a
SpringerLink (Online service)
$3
836513
773
0
$t
Springer eBooks
830
0
$a
SpringerBriefs in applied sciences and technology.
$3
1565541
856
4 0
$u
http://dx.doi.org/10.1007/978-4-431-54795-2
950
$a
Engineering (Springer-11647)
筆 0 讀者評論
館藏地:
全部
電子資源
出版年:
卷號:
館藏
1 筆 • 頁數 1 •
1
條碼號
典藏地名稱
館藏流通類別
資料類型
索書號
使用類型
借閱狀態
預約狀態
備註欄
附件
W9242869
電子資源
11.線上閱覽_V
電子書
EB
一般使用(Normal)
在架
0
1 筆 • 頁數 1 •
1
多媒體
評論
新增評論
分享你的心得
Export
取書館
處理中
...
變更密碼
登入