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Study of wet-chemically-prepared hyd...

Zhou, Hui.

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Study of wet-chemically-prepared hydrogen-terminated silicon (111) surfaces and a novel implementation of a high-resolution interferometer.

紀錄類型:	書目-電子資源 : Monograph/item
正題名/作者:	Study of wet-chemically-prepared hydrogen-terminated silicon (111) surfaces and a novel implementation of a high-resolution interferometer./
作者:	Zhou, Hui.
面頁冊數:	270 p.
附註:	Source: Dissertation Abstracts International, Volume: 65-02, Section: B, page: 0804.
Contained By:	Dissertation Abstracts International65-02B.
標題:	Physics, Condensed Matter. -
電子資源:	http://pqdd.sinica.edu.tw/twdaoapp/servlet/advanced?query=3124023
ISBN:	0496713310

Study of wet-chemically-prepared hydrogen-terminated silicon (111) surfaces and a novel implementation of a high-resolution interferometer.
Zhou, Hui.

Study of wet-chemically-prepared hydrogen-terminated silicon (111) surfaces and a novel implementation of a high-resolution interferometer. - 270 p.

Source: Dissertation Abstracts International, Volume: 65-02, Section: B, page: 0804.

Thesis (Ph.D.)--University of Maryland, College Park, 2004.

This thesis summarizes my graduate study under the National Institute of Standards and Technology (NIST) Atom-Based Dimensional Metrology Project, in which we are developing methods for measuring sub-micrometer dimensions including directly counting atom spacings on a silicon-surface lattice.

ISBN: 0496713310Subjects--Topical Terms:

1018743
Physics, Condensed Matter.

Study of wet-chemically-prepared hydrogen-terminated silicon (111) surfaces and a novel implementation of a high-resolution interferometer.
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100 1 $a Zhou, Hui. $3 1939141
245 1 0 $a Study of wet-chemically-prepared hydrogen-terminated silicon (111) surfaces and a novel implementation of a high-resolution interferometer.
300 $a 270 p.
500 $a Source: Dissertation Abstracts International, Volume: 65-02, Section: B, page: 0804.
500 $a Advisers: Ellen D. Williams; Richard M. Silver.
502 $a Thesis (Ph.D.)--University of Maryland, College Park, 2004.
520 $a This thesis summarizes my graduate study under the National Institute of Standards and Technology (NIST) Atom-Based Dimensional Metrology Project, in which we are developing methods for measuring sub-micrometer dimensions including directly counting atom spacings on a silicon-surface lattice.
520 $a Atomically flat, hydrogen-terminated Si(111) surfaces are prepared using wet chemistry. The surface morphology after the wet-chemistry preparation was found to be dependent on both the initial etching time and wafer miscut. These two factors have been neglected in literature. To produce a morphology of uniform, long-range steps and terraces, the miscut angle has to be larger than a certain angle. The development and dynamics of the surface morphology was explained by preferential etching. A kinetic Monte-Carlo simulation was used to quantitatively study some of the key aspects of the surface-morphology evolution, such as step flow, pit expansion, and step-pit collision.
520 $a The hydrogen-terminated silicon surfaces prepared using wet-chemical etching method were used as substrates to create nanometer-scale patterns using a scanning tunneling microscope (STM)-probe-induced surface modification in both ultra-high vacuum (UHV) and low-vacuum environments. Patterns created in UHV have linewidths below 10 nm, while patterns created in low vacuum had a minimum linewidth of nominally 20 nm. The pattern created in a low vacuum environment was further processed using SF6 reactive-ion etching, resulting in patterns whose aspect ratio had increased more than 5 times.
520 $a To enable accurate measurement of atom spacings, a Michelson interferometer of novel design was implemented in this research, based on the principle that during operation, the interference-fringe signal is locked at a zero point by tuning the laser frequency, thus transferring the displacement measurement into a laser-frequency measurement and greatly increasing the measurement resolution. The interferometer is designed to be integrated into an ultra-high-vacuum scanning tunneling microscope for atom-resolved measurements. This unique implementation achieves a nominal resolution of sub-angstrom. In this thesis, the principles of the interferometer design and the uncertainty budget of the interferometer are discussed.
590 $a School code: 0117.
650 4 $a Physics, Condensed Matter. $3 1018743
650 4 $a Chemistry, Physical. $3 560527
650 4 $a Physics, Optics. $3 1018756
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690 $a 0494
690 $a 0752
710 2 0 $a University of Maryland, College Park. $3 657686
773 0 $t Dissertation Abstracts International $g 65-02B.
790 1 0 $a Williams, Ellen D., $e advisor
790 1 0 $a Silver, Richard M., $e advisor
790 $a 0117
791 $a Ph.D.
792 $a 2004
856 4 0 $u http://pqdd.sinica.edu.tw/twdaoapp/servlet/advanced?query=3124023