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[ subject:"Chemical mechanical planarization." ]
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Advances in chemical mechanical plan...
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Babu, S. V.,
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Advances in chemical mechanical planarization (CMP) /
紀錄類型:
書目-電子資源 : Monograph/item
正題名/作者:
Advances in chemical mechanical planarization (CMP) // edited by Suryadevara Babu.
其他作者:
Babu, S. V.,
出版者:
Waltham, MA :Woodhead Publishing, : 2016.,
面頁冊數:
1 online resource.
標題:
Chemical mechanical planarization. -
電子資源:
http://www.sciencedirect.com/science/book/9780081001653
ISBN:
9780081001653
Advances in chemical mechanical planarization (CMP) /
Advances in chemical mechanical planarization (CMP) /
edited by Suryadevara Babu. - Waltham, MA :Woodhead Publishing,2016. - 1 online resource. - Woodhead publishing series in electronic and optical materials ;number 86. - Woodhead Publishing series in electronic and optical materials ;number 86..
Includes bibliographical references and index.
ISBN: 9780081001653Subjects--Topical Terms:
3235220
Chemical mechanical planarization.
Index Terms--Genre/Form:
542853
Electronic books.
LC Class. No.: TK7874.84
Dewey Class. No.: 621.381
Advances in chemical mechanical planarization (CMP) /
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