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Liquid temperature control for preci...

Huang, Jih-Jenn.

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Liquid temperature control for precision machines.

Record Type:	Language materials, printed : Monograph/item
Title/Author:	Liquid temperature control for precision machines./
Author:	Huang, Jih-Jenn.
Description:	179 p.
Notes:	Adviser: Daniel B. DeBra.
Contained By:	Dissertation Abstracts International58-07B.
Subject:	Engineering, Mechanical. -
Online resource:	http://pqdd.sinica.edu.tw/twdaoapp/servlet/advanced?query=9802056
ISBN:	0591517485

Liquid temperature control for precision machines.
Huang, Jih-Jenn.

Liquid temperature control for precision machines. - 179 p.

Adviser: Daniel B. DeBra.

Thesis (Ph.D.)--Stanford University, 1997.

Thermal effects are principal limitations for any precision machining process. A temperature control system is necessary for a machine designed to meet the surface finish and figure accuracy on the order of 25 nm. At Stanford's Quiet Hydraulic laboratory, a precision machine was built to meet the above accuracy level, and used as a testbed for novel sensing techniques and control applications. The machine has an open oil circulation system, and uses hydraulic actuation, bearings and liquid showering for temperature control.

ISBN: 0591517485Subjects--Topical Terms:

783786
Engineering, Mechanical.

Liquid temperature control for precision machines.
LDR:03213nam 2200301 a 45 001 926804
005 20110422
008 110422s1997 eng d
020 $a 0591517485
035 $a (UnM)AAI9802056
035 $a AAI9802056
040 $a UnM $c UnM
100 1 $a Huang, Jih-Jenn. $3 1250388
245 1 0 $a Liquid temperature control for precision machines.
300 $a 179 p.
500 $a Adviser: Daniel B. DeBra.
500 $a Source: Dissertation Abstracts International, Volume: 58-07, Section: B, page: 3884.
502 $a Thesis (Ph.D.)--Stanford University, 1997.
520 $a Thermal effects are principal limitations for any precision machining process. A temperature control system is necessary for a machine designed to meet the surface finish and figure accuracy on the order of 25 nm. At Stanford's Quiet Hydraulic laboratory, a precision machine was built to meet the above accuracy level, and used as a testbed for novel sensing techniques and control applications. The machine has an open oil circulation system, and uses hydraulic actuation, bearings and liquid showering for temperature control.
520 $a A commercially available heat exchanger is used to regulate the fluid temperature and the building chilled water is used as the heat sink. The chilled water has a temperature variation range as large as 5$\sp\circ $c , and a time delay at about 120 sec. For this time varying, distributed parameter, and long time-delay thermal process, regulating the liquid temperature variation down to m$\sp\circ $c level is a very challenging problem.
520 $a Feed-forward control is used to compensate for the chilled water temperature variations and successive feedback loops with PI controllers are implemented to regulate the critical temperature points of the machine. Satisfactory long duration regulation results are found through these practical approaches. In order to further extend the system bandwidth and reduce the time delay effects in the control loop, the Smith-predictor is chosen because of its delay-free characteristic. The Smith-predictor has classically employed a model of the plant characterized by plant parameters such as the delay and time constant. Care must be taken that the system performance and stability are not compromised by the inevitable parameter mismatches between the plant and the model. Detailed theoretical analyses of the system performance through parametric and temporal mismatches are investigated and accompanied with closed form solutions. Based on the theoretical results, the performance and stability characteristics of the predictor type control system can be studied under a broader point of view. Some interesting results are found that the system performance can be improved by introducing intentional mismatches. The parameter mismatches are able to add more control flexibility to tune up the system. The results have also been verified by experimental observations.
590 $a School code: 0212.
650 4 $a Engineering, Mechanical. $3 783786
650 4 $a Engineering, System Science. $3 1018128
690 $a 0548
690 $a 0790
710 2 0 $a Stanford University. $3 754827
773 0 $t Dissertation Abstracts International $g 58-07B.
790 $a 0212
790 1 0 $a DeBra, Daniel B., $e advisor
791 $a Ph.D.
792 $a 1997
856 4 0 $u http://pqdd.sinica.edu.tw/twdaoapp/servlet/advanced?query=9802056