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Rare-earth implanted MOS devices for...

Rebohle, Lars.

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Rare-earth implanted MOS devices for silicon photonics = microstructural, electrical and optoelectronic properties /

Record Type:	Language materials, printed : Monograph/item
Title/Author:	Rare-earth implanted MOS devices for silicon photonics/ by Lars Rebohle, Wolfgang Skorupa.
Reminder of title:	microstructural, electrical and optoelectronic properties /
Author:	Rebohle, Lars.
other author:	Skorupa, Wolfgang.
Published:	Berlin, Heidelberg :Springer-Verlag Berlin Heidelberg, : 2010.,
Description:	xviii, 173 p. :ill., digital ;24 cm.
Series:	Springer series in materials science,
Contained By:	Springer eBooks
Subject:	Metal oxide semiconductors. -
Online resource:	http://dx.doi.org/10.1007/978-3-642-14447-9
ISBN:	9783642144462 (paper)

Rare-earth implanted MOS devices for silicon photonics = microstructural, electrical and optoelectronic properties /
Rebohle, Lars.

Rare-earth implanted MOS devices for silicon photonicsmicrostructural, electrical and optoelectronic properties /[electronic resource] :by Lars Rebohle, Wolfgang Skorupa. - Berlin, Heidelberg :Springer-Verlag Berlin Heidelberg,2010. - xviii, 173 p. :ill., digital ;24 cm. - Springer series in materials science,1420933-033X ;.

ISBN: 9783642144462 (paper)Subjects--Topical Terms:

649541
Metal oxide semiconductors.

LC Class. No.: TK7871.99.M44 / R37 2010

Dewey Class. No.: 621.39732

Rare-earth implanted MOS devices for silicon photonics = microstructural, electrical and optoelectronic properties /
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020 $a 9783642144462 (paper)
020 $a 9783642144479 (electronic bk.)
035 $a 978-3-642-14446-2
050 0 4 $a TK7871.99.M44 $b R37 2010
082 0 4 $a 621.39732 $2 22
100 1 $a Rebohle, Lars. $3 1245547
245 1 0 $a Rare-earth implanted MOS devices for silicon photonics $h [electronic resource] : $b microstructural, electrical and optoelectronic properties / $c by Lars Rebohle, Wolfgang Skorupa.
260 $a Berlin, Heidelberg : $b Springer-Verlag Berlin Heidelberg, $c 2010.
300 $a xviii, 173 p. : $b ill., digital ; $c 24 cm.
440 0 $a Springer series in materials science, $x 0933-033X ; $v 142
650 0 $a Metal oxide semiconductors. $3 649541
650 1 4 $a Materials Science. $3 890867
650 2 4 $a Optical and Electronic Materials. $3 891120
700 1 $a Skorupa, Wolfgang. $3 1245548
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856 4 0 $u http://dx.doi.org/10.1007/978-3-642-14447-9
950 $a Physics and Astronomy (Springer-11651)