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Microsystem design

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Microsystem design

Record Type:	Language materials, printed : Monograph/item
Title/Author:	Microsystem design/ Stephen D. Senturia.
Author:	Senturia, Stephen D.
Published:	Boston :Kluwer Academic Publishers, : c2001.,
Description:	xxvi, 689 p. :ill., digital ;24 cm.
Contained By:	Springer e-books
Subject:	Microelectromechanical systems - Design and construction. -
Online resource:	http://dx.doi.org/10.1007/b117574
ISBN:	9780306476013 (electronic bk.)

Microsystem design
Senturia, Stephen D.

Microsystem design[electronic resource] /Stephen D. Senturia. - Boston :Kluwer Academic Publishers,c2001. - xxvi, 689 p. :ill., digital ;24 cm.

ISBN: 9780306476013 (electronic bk.)Subjects--Topical Terms:

753820
Microelectromechanical systems
--Design and construction.

LC Class. No.: TK7875 / .S46 2001

Dewey Class. No.: 621.381

Microsystem design
LDR:00633nam 2200217 a 45 001 895446
003 GreenPo
005 20101130
006 m d
007 cr nn 008maaau
008 101130s2001 mau s j eng d
020 $a 9780306476013 (electronic bk.)
020 $a 9780792372462 (paper)
035 $a 978-0-7923-7246-2
050 0 0 $a TK7875 $b .S46 2001
082 0 0 $a 621.381 $2 21
100 1 $a Senturia, Stephen D. $3 1072347
245 1 0 $a Microsystem design $h [electronic resource] / $c Stephen D. Senturia.
260 $a Boston : $c c2001. $b Kluwer Academic Publishers,
300 $a xxvi, 689 p. : $b ill., digital ; $c 24 cm.
650 0 $a Microelectromechanical systems $x Design and construction. $3 753820
650 0 $a Microelectronics. $3 649832
650 0 $a System design. $3 518843
710 2 $a SpringerLink (Online service) $3 836513
773 0 $t Springer e-books
856 4 0 $u http://dx.doi.org/10.1007/b117574
950 $a Engineering

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W9087210

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EB W9087210

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