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Fabrication of ceramic material with...
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University of Massachusetts Lowell.
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Fabrication of ceramic material with nanoscale features via soft lithography.
Record Type:
Electronic resources : Monograph/item
Title/Author:
Fabrication of ceramic material with nanoscale features via soft lithography./
Author:
Barot, Shital.
Description:
52 p.
Notes:
Adviser: Marina Ruths.
Contained By:
Masters Abstracts International46-05.
Subject:
Chemistry, Analytical. -
Online resource:
http://pqdd.sinica.edu.tw/twdaoapp/servlet/advanced?query=1452629
ISBN:
9780549512714
Fabrication of ceramic material with nanoscale features via soft lithography.
Barot, Shital.
Fabrication of ceramic material with nanoscale features via soft lithography.
- 52 p.
Adviser: Marina Ruths.
Thesis (M.S.)--University of Massachusetts Lowell, 2008.
The fabrication of a ceramic material with nanoscale features via the soft lithography method is demonstrated in this study, and applied to the production of cantilevers for SPM.
ISBN: 9780549512714Subjects--Topical Terms:
586156
Chemistry, Analytical.
Fabrication of ceramic material with nanoscale features via soft lithography.
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Fabrication of ceramic material with nanoscale features via soft lithography.
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52 p.
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Adviser: Marina Ruths.
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Source: Masters Abstracts International, Volume: 46-05, page: 2687.
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Thesis (M.S.)--University of Massachusetts Lowell, 2008.
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The fabrication of a ceramic material with nanoscale features via the soft lithography method is demonstrated in this study, and applied to the production of cantilevers for SPM.
520
$a
The materials produced are characterized by atomic force microscopy and scanning electron microscopy.
520
$a
SPM tips are typically produced by MEMS processing methods, which limit the possible geometries and solid cross sections of the resultant cantilevers. In contrast, the ease of molding of pre-ceramic polymers may enable a wider variety of cantilever geometries, in particular those capable of extremely high frequency oscillations and therefore suitable for high speed SPM techniques.
520
$a
A nanostructured silicone mold is cast using a silicon master; the pattern is then transferred to a pre-ceramic precursor polymer via soft lithography. The pre-ceramic polymer, following curing, is convened to silicon carbide (SiC) using a single step pyrolysis process.
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School code: 0111.
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http://pqdd.sinica.edu.tw/twdaoapp/servlet/advanced?query=1452629
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