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Fabrication of ceramic material with...

University of Massachusetts Lowell.

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Fabrication of ceramic material with nanoscale features via soft lithography.

紀錄類型:	書目-電子資源 : Monograph/item
正題名/作者:	Fabrication of ceramic material with nanoscale features via soft lithography./
作者:	Barot, Shital.
面頁冊數:	52 p.
附註:	Adviser: Marina Ruths.
Contained By:	Masters Abstracts International46-05.
標題:	Chemistry, Analytical. -
電子資源:	http://pqdd.sinica.edu.tw/twdaoapp/servlet/advanced?query=1452629
ISBN:	9780549512714

Fabrication of ceramic material with nanoscale features via soft lithography.
Barot, Shital.

Fabrication of ceramic material with nanoscale features via soft lithography. - 52 p.

Adviser: Marina Ruths.

Thesis (M.S.)--University of Massachusetts Lowell, 2008.

The fabrication of a ceramic material with nanoscale features via the soft lithography method is demonstrated in this study, and applied to the production of cantilevers for SPM.

ISBN: 9780549512714Subjects--Topical Terms:

586156
Chemistry, Analytical.

Fabrication of ceramic material with nanoscale features via soft lithography.
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245 1 0 $a Fabrication of ceramic material with nanoscale features via soft lithography.
300 $a 52 p.
500 $a Adviser: Marina Ruths.
500 $a Source: Masters Abstracts International, Volume: 46-05, page: 2687.
502 $a Thesis (M.S.)--University of Massachusetts Lowell, 2008.
520 $a The fabrication of a ceramic material with nanoscale features via the soft lithography method is demonstrated in this study, and applied to the production of cantilevers for SPM.
520 $a The materials produced are characterized by atomic force microscopy and scanning electron microscopy.
520 $a SPM tips are typically produced by MEMS processing methods, which limit the possible geometries and solid cross sections of the resultant cantilevers. In contrast, the ease of molding of pre-ceramic polymers may enable a wider variety of cantilever geometries, in particular those capable of extremely high frequency oscillations and therefore suitable for high speed SPM techniques.
520 $a A nanostructured silicone mold is cast using a silicon master; the pattern is then transferred to a pre-ceramic precursor polymer via soft lithography. The pre-ceramic polymer, following curing, is convened to silicon carbide (SiC) using a single step pyrolysis process.
590 $a School code: 0111.
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650 4 $a Engineering, Electronics and Electrical. $3 626636
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