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Gettering Defects in Semiconductors

~

Skoupov, Vladimir D..

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Gettering Defects in Semiconductors

Record Type:	Language materials, printed : Monograph/item
Title/Author:	Gettering Defects in Semiconductors/ by Victor A. Perevoschikov, Vladimir D. Skoupov.
Author:	Perevoschikov, Victor A..
other author:	Skoupov, Vladimir D..
Published:	Berlin, Heidelberg :Springer Berlin Heidelberg, : 2005.,
Description:	xv, 386 p. :ill., digital ;25 cm.
Series:	Springer Series in Advanced Microelectronics,
Contained By:	Springer e-books
Subject:	Getters. -
Online resource:	http://dx.doi.org/10.1007/3-540-29499-6http://dx.doi.org/10.1007/3-540-29499-6
ISBN:	9783540262442 (paper)

Gettering Defects in Semiconductors
Perevoschikov, Victor A..

Gettering Defects in Semiconductors[electronic resource] /by Victor A. Perevoschikov, Vladimir D. Skoupov. - Berlin, Heidelberg :Springer Berlin Heidelberg,2005. - xv, 386 p. :ill., digital ;25 cm. - Springer Series in Advanced Microelectronics,191437-0387 ;.

ISBN: 9783540262442 (paper)Subjects--Topical Terms:

894269
Getters.

LC Class. No.: QC611.6.D4 / P4713 2005

Dewey Class. No.: 621.38152

Gettering Defects in Semiconductors
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020 $a 9783540262442 (paper)
020 $a 9783540294993 (electronic bk.)
035 $a 978-3-540-26244-2
040 $a NDHU $c NDHU $d NDHU
050 0 0 $a QC611.6.D4 $b P4713 2005
082 0 0 $a 621.38152 $2 22
100 $a Perevoschikov, Victor A.. $3 894268
245 1 0 $a Gettering Defects in Semiconductors $h [electronic resource] / $c by Victor A. Perevoschikov, Vladimir D. Skoupov.
260 $a Berlin, Heidelberg : $c 2005. $b Springer Berlin Heidelberg,
300 $a xv, 386 p. : $b ill., digital ; $c 25 cm.
440 0 $a Springer Series in Advanced Microelectronics, $x 1437-0387 ; $v 19
650 $a Getters. $3 894269
650 $a Semiconductors $x Defects. $3 652234
650 $a Semiconductors $x Materials. $3 553292
650 $a Chemistry. $3 516420
650 $a Industrial Chemistry/Chemical Engineering. $3 890826
650 $a Optical and Electronic Materials. $3 891120
700 $a Skoupov, Vladimir D.. $3 894267
710 $a SpringerLink (Online service) $3 836513
773 0 $t Springer e-books
856 4 0 $u http://dx.doi.org/10.1007/3-540-29499-6 $z http://dx.doi.org/10.1007/3-540-29499-6
950 $a Chemistry and Materials Science (Springer-11644; ZDB-2-CMS)

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