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Shape and Functional Elements of the Bulk Silicon Microtechnique = A Manual of Wet-Etched Silicon Structures /

Record Type:	Language materials, printed : Monograph/item
Title/Author:	Shape and Functional Elements of the Bulk Silicon Microtechnique/ by Joachim Fruhauf.
Reminder of title:	A Manual of Wet-Etched Silicon Structures /
Author:	Fruhauf, Joachim.
Published:	Berlin, Heidelberg :Springer-Verlag Berlin Heidelberg, : 2005.,
Description:	xii, 221 p. :ill., digital ;24 cm.
Contained By:	Springer e-books
Subject:	Detectors. -
Online resource:	http://dx.doi.org/10.1007/b138230http://dx.doi.org/10.1007/b138230
ISBN:	9783540221098 (paper)

Shape and Functional Elements of the Bulk Silicon Microtechnique = A Manual of Wet-Etched Silicon Structures /
Fruhauf, Joachim.

Shape and Functional Elements of the Bulk Silicon MicrotechniqueA Manual of Wet-Etched Silicon Structures /[electronic resource] :by Joachim Fruhauf. - Berlin, Heidelberg :Springer-Verlag Berlin Heidelberg,2005. - xii, 221 p. :ill., digital ;24 cm.

ISBN: 9783540221098 (paper)Subjects--Topical Terms:

556895
Detectors.

LC Class. No.: QC611.8.S5 / F48 2005

Dewey Class. No.: 620.193

Shape and Functional Elements of the Bulk Silicon Microtechnique = A Manual of Wet-Etched Silicon Structures /
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650 $a Electronics and Microelectronics, Instrumentation. $3 893838
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