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Electroceramic-Based MEMS = Fabricat...
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Setter, Nava.
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Electroceramic-Based MEMS = Fabrication-Technology and Applications /
Record Type:
Language materials, printed : Monograph/item
Title/Author:
Electroceramic-Based MEMS/ edited by Nava Setter.
Reminder of title:
Fabrication-Technology and Applications /
other author:
Setter, Nava.
Published:
Boston, MA :Springer Science+Business Media, Inc., : 2005.,
Description:
xii, 414 p. :ill., digital ;25 cm.
Series:
Electronic Materials: Science and Technology,
Contained By:
Springer e-books
Subject:
Microelectromechanical systems. -
Online resource:
http://dx.doi.org/10.1007/b101200http://dx.doi.org/10.1007/b101200
ISBN:
9780387233109 (paper)
Electroceramic-Based MEMS = Fabrication-Technology and Applications /
Electroceramic-Based MEMS
Fabrication-Technology and Applications /[electronic resource] :edited by Nava Setter. - Boston, MA :Springer Science+Business Media, Inc.,2005. - xii, 414 p. :ill., digital ;25 cm. - Electronic Materials: Science and Technology,91386-3290 ;.
ISBN: 9780387233109 (paper)Subjects--Topical Terms:
567138
Microelectromechanical systems.
LC Class. No.: TK7875 / .E42 2005
Dewey Class. No.: 621.381
Electroceramic-Based MEMS = Fabrication-Technology and Applications /
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edited by Nava Setter.
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Chemistry and Materials Science (Springer-11644; ZDB-2-CMS)
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