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Plasma processing of materials = scientific opportunities and technological challenges/

Record Type:	Electronic resources : Monograph/item
Title/Author:	Plasma processing of materials/ Panel on Plasma Processing of Materials, Plasma Science Committee, Board on Physics and Astronomy, Commission on Physical Sciences, Mathematics, and Applications, National Research Council.
Reminder of title:	scientific opportunities and technological challenges/
Corporate Body:	National Research Council (U.S.).
Published:	Washington, D.C. :National Academy Press, : 1991.,
Description:	xii, 75 p. :ill. ;28 cm.
Subject:	Microelectronics - Materials -
Online resource:	https://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&AN=14049An electronic book accessible through the World Wide Web; click for information
ISBN:	0585084637 (electronic bk.)

Plasma processing of materials = scientific opportunities and technological challenges/
National Research Council (U.S.).Panel on Plasma Processing of Materials.

Plasma processing of materialsscientific opportunities and technological challenges/[electronic resource] :Panel on Plasma Processing of Materials, Plasma Science Committee, Board on Physics and Astronomy, Commission on Physical Sciences, Mathematics, and Applications, National Research Council. - Washington, D.C. :National Academy Press,1991. - xii, 75 p. :ill. ;28 cm.

Electronic reproduction.
Boulder, Colo. :
NetLibrary,
2000.

Available via the World Wide Web.

ISBN: 0585084637 (electronic bk.)Subjects--Topical Terms:

770528
Microelectronics
--MaterialsIndex Terms--Genre/Form:

542853
Electronic books.

LC Class. No.: TA2005 / .N37 1991eb

Dewey Class. No.: 621.044

Plasma processing of materials = scientific opportunities and technological challenges/
LDR:01237cmm a2200241 a 45 001 708165
003 OCoLC
005 20061024
006 m u
007 cr cn-
008 250516s1991 dcua s 000 0 eng d
020 $a 0585084637 (electronic bk.)
035 $a ocm43475627
035 $a 708165
040 $a N $c N $d OCL $d OCLCQ $d OCL
049 $a AMFA
050 1 4 $a TA2005 $b .N37 1991eb
082 0 4 $a 621.044 $2 20
110 $a National Research Council (U.S.). $b Panel on Plasma Processing of Materials. $3 770527
245 1 0 $a Plasma processing of materials $h [electronic resource] : $b scientific opportunities and technological challenges/ $c Panel on Plasma Processing of Materials, Plasma Science Committee, Board on Physics and Astronomy, Commission on Physical Sciences, Mathematics, and Applications, National Research Council.
260 $a Washington, D.C. : $c 1991. $b National Academy Press,
300 $a xii, 75 p. : $b ill. ; $c 28 cm.
533 $a Electronic reproduction. $b Boulder, Colo. : $c NetLibrary, $d 2000. $n Available via the World Wide Web. $n Available in multiple electronic file formats. $n Access may be limited to NetLibrary affiliated libraries.
650 $a Microelectronics $x Materials $x Effect of radiation on. $3 770528
650 $a Plasma engineering. $3 674159
650 $a Surfaces (Technology) $3 652796
655 $a Electronic books. $2 lcsh $3 542853
710 $a NetLibrary, Inc. $3 542851
856 4 $3 Bibliographic record display $u https://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&AN=14049 $z An electronic book accessible through the World Wide Web; click for information
994 $a 92 $b AMF