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Introduction to microfabrication /

~

Franssila, Sami.

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Introduction to microfabrication /

Record Type:	Language materials, printed : Monograph/item
Title/Author:	Introduction to microfabrication // Sami Franssila.
Author:	Franssila, Sami.
Published:	Chichester, West Sussex, England :J. Wiley, : c2004.,
Description:	xvii, 401 p. :ill. ;25 cm.
Subject:	Electronic apparatus and appliances. -
Online resource:	http://www.loc.gov/catdir/toc/wiley041/2004004940.htmlhttp://www.loc.gov/catdir/toc/wiley041/2004004940.html
Online resource:	http://www.loc.gov/catdir/description/wiley041/2004004940.htmlhttp://www.loc.gov/catdir/description/wiley041/2004004940.html
ISBN:	0470851058

Introduction to microfabrication /
Franssila, Sami.

Introduction to microfabrication /Sami Franssila. - Chichester, West Sussex, England :J. Wiley,c2004. - xvii, 401 p. :ill. ;25 cm.

Includes bibliographical references and index.

ISBN: 0470851058

LCCN: 2004004940Subjects--Topical Terms:

526237
Electronic apparatus and appliances.

LC Class. No.: TK7875 / .F73 2004

Dewey Class. No.: 621.3

Introduction to microfabrication /
LDR:00898cam a2200217 a 45 001 693773
005 20070123
008 041125s2004 enka b 00110 eng
010 $a 2004004940
020 $a 0470851058
020 $a 0470851066 (pbk.) : $c US55.00
035 $a psw93000003 im95t0023
040 $a DLC $c DLC $d DLC
042 $a pcc
050 0 0 $a TK7875 $b .F73 2004
082 0 0 $a 621.3 $2 22
100 $a Franssila, Sami. $3 743508
245 1 0 $a Introduction to microfabrication / $c Sami Franssila.
260 $a Chichester, West Sussex, England : $c c2004. $b J. Wiley,
300 $a xvii, 401 p. : $b ill. ; $c 25 cm.
504 $a Includes bibliographical references and index.
650 $a Electronic apparatus and appliances. $3 526237
650 $a Microelectromechanical systems. $3 567138
650 $a Microfabrication. $3 743509
856 4 1 $3 Table of contents $u http://www.loc.gov/catdir/toc/wiley041/2004004940.html $z http://www.loc.gov/catdir/toc/wiley041/2004004940.html
856 4 2 $3 Publisher description $u http://www.loc.gov/catdir/description/wiley041/2004004940.html $z http://www.loc.gov/catdir/description/wiley041/2004004940.html

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2 records • Pages 1 •
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W0053208

六樓西文書區HC-Z(6F Western Language Books)

01.外借(書)_YB

一般圖書

TK7875 F73 2004

一般使用(Normal)

On shelf

0

W0126743

六樓西文書區HC-Z(6F Western Language Books)

01.外借(書)_YB

一般圖書

TK7875 F73 2004

一般使用(Normal)

On shelf

0

2 records • Pages 1 •
1

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