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Chemical physics of thin film deposi...

Pauleau, Y.

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Chemical physics of thin film deposition processes for micro- and nano-technologies /

Record Type:	Language materials, printed : Monograph/item
Title/Author:	Chemical physics of thin film deposition processes for micro- and nano-technologies // edited by Yves Pauleau.
other author:	Pauleau, Y.
Published:	Dordrecht ;Kluwer Academic Publishers, : c2002.,
Description:	xiii, 363 p. :ill. ;25 cm.
Notes:	"Published in cooperation with NATO Scientific Affairs Division."
Series:	NATO science series.
Subject:	Nanotechnology - Congresses. -
ISBN:	1402005245 :

Chemical physics of thin film deposition processes for micro- and nano-technologies /
Chemical physics of thin film deposition processes for micro- and nano-technologies /edited by Yves Pauleau. - Dordrecht ;Kluwer Academic Publishers,c2002. - xiii, 363 p. :ill. ;25 cm. - NATO science series.Series II,Mathematics, physics, and chemistry ;v. 55.

"Published in cooperation with NATO Scientific Affairs Division."

Includes bibliographical references and index.

ISBN: 1402005245 :NT5048

LCCN: 2002072962Subjects--Topical Terms:

536292
Nanotechnology
--Congresses.

LC Class. No.: TA418.9.T45 / C47 2002

Dewey Class. No.: 621.3815/2

Chemical physics of thin film deposition processes for micro- and nano-technologies /
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005 20031211
008 030224s2002 ne a b 101 0 eng
010 $a 2002072962
020 $a 1402005245 : $c NT5048
035 $a met9100059
040 $a DLC $c DLC $d DLC $d DH
042 $a pcc
050 0 0 $a TA418.9.T45 $b C47 2002
082 0 0 $a 621.3815/2 $2 21
245 0 0 $a Chemical physics of thin film deposition processes for micro- and nano-technologies / $c edited by Yves Pauleau.
260 $a Dordrecht ; $a Boston : $c c2002. $b Kluwer Academic Publishers,
300 $a xiii, 363 p. : $b ill. ; $c 25 cm.
440 0 $a NATO science series. $n Series II, $p Mathematics, physics, and chemistry ; $v v. 55
500 $a "Published in cooperation with NATO Scientific Affairs Division."
504 $a Includes bibliographical references and index.
650 $a Nanotechnology $x Congresses. $3 536292
650 $a Thin films $x Congresses. $3 649261
700 $a Pauleau, Y. $3 659063