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Optical diagnostics for thin film pr...

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Herman, Irving P.

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Optical diagnostics for thin film processing /

Record Type:	Language materials, printed : Monograph/item
Title/Author:	Optical diagnostics for thin film processing // Irving P. Herman.
Author:	Herman, Irving P.
Published:	San Diego, CA :Academic Press, : c1996.,
Description:	xxix, 783 p. :ill. ;24 cm.
Subject:	Spectrum analysis - Industrial applications. -
ISBN:	0123420709 :

Optical diagnostics for thin film processing /
Herman, Irving P.

Optical diagnostics for thin film processing /Irving P. Herman. - San Diego, CA :Academic Press,c1996. - xxix, 783 p. :ill. ;24 cm.

Includes bibliographical references and index.

ISBN: 0123420709 :US32.95

LCCN: 95016540Subjects--Topical Terms:

711944
Spectrum analysis
--Industrial applications.

LC Class. No.: QC176.84.S93 / H47 1996

Dewey Class. No.: 621.3815/2/0287

Optical diagnostics for thin film processing /
LDR:00559cam a2200181 a 45 001 675285
003 DLC
005 19991125151719.0
008 991122s1996 caua b 001 0 eng
010 $a 95016540
020 $a 0123420709 : $c US32.95
035 $a ps 00890019
040 $a DLC $c DLC $d DLC $d DH
050 0 0 $a QC176.84.S93 $b H47 1996
082 0 0 $a 621.3815/2/0287 $2 20
100 $a Herman, Irving P. $3 711943
245 1 0 $a Optical diagnostics for thin film processing / $c Irving P. Herman.
260 $a San Diego, CA : $c c1996. $b Academic Press,
300 $a xxix, 783 p. : $b ill. ; $c 24 cm.
504 $a Includes bibliographical references and index.
650 $a Spectrum analysis $x Industrial applications. $3 711944
650 $a Thin films $x Surfaces. $3 697334

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六樓西文書區HC-Z(6F Western Language Books)

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QC176.84.S93 H47 1996

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