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Computational modeling in semiconduc...

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Meyyappan, M.

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Computational modeling in semiconductor processing /

Record Type:	Language materials, printed : Monograph/item
Title/Author:	Computational modeling in semiconductor processing // M. Meyyappan, editor.
other author:	Meyyappan, M.
Published:	Boston :Artech House, : c1995.,
Description:	x, 363 p. :ill. ;24 cm.
Series:	The Artech House materials science library
Subject:	Process control - Mathematical models. -
ISBN:	0890067074

Computational modeling in semiconductor processing /
Computational modeling in semiconductor processing /M. Meyyappan, editor. - Boston :Artech House,c1995. - x, 363 p. :ill. ;24 cm. - The Artech House materials science library.

Includes bibliographical references and index.

ISBN: 0890067074

LCCN: 94017563Subjects--Topical Terms:

669105
Process control
--Mathematical models.

LC Class. No.: TK7871.85 / .C593 1995

Dewey Class. No.: 621.3815/2/0113

Computational modeling in semiconductor processing /
LDR:00602nam a2200193 a 45 001 652884
003 DLC
005 19940915130428.6
008 940503s1995 maua b 001 0 eng
010 $a 94017563
020 $a 0890067074
035 $a dt 00012485
040 $a DLC $c DLC $d DLC
050 0 0 $a TK7871.85 $b .C593 1995
082 0 0 $a 621.3815/2/0113 $2 20
245 0 0 $a Computational modeling in semiconductor processing / $c M. Meyyappan, editor.
260 $a Boston : $c c1995. $b Artech House,
300 $a x, 363 p. : $b ill. ; $c 24 cm.
440 4 $a The Artech House materials science library
504 $a Includes bibliographical references and index.
650 $a Process control $x Mathematical models. $3 669105
650 $a Semiconductor industry. $3 649671
650 $a Semiconductors $x Design and construction $x Data processing. $3 670591
700 $a Meyyappan, M. $3 670590

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W0025146

罕用書庫221室(美崙校區,調書請點預約)(RU_221)

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TK7871.85 C738 1995

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