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Advanced metallization for devices a...

Murarka, S. P.

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Advanced metallization for devices and circuits--science, technology, and manufacturability : = symposium held April 4-8, 1994, San Francisco, California, U.S.A. /

Record Type:	Language materials, printed : Monograph/item
Title/Author:	Advanced metallization for devices and circuits--science, technology, and manufacturability :/ editors, S.P. Murarka ... [et al.].
Reminder of title:	symposium held April 4-8, 1994, San Francisco, California, U.S.A. /
other author:	Murarka, S. P.
Published:	Pittsburgh, Pa. :Materials Research Society, : c1994.,
Description:	xiv, 768 p. :ill. ;24 cm.
Subject:	Metallic films - congresses. -
ISBN:	1558992375

Advanced metallization for devices and circuits--science, technology, and manufacturability : = symposium held April 4-8, 1994, San Francisco, California, U.S.A. /
Advanced metallization for devices and circuits--science, technology, and manufacturability :symposium held April 4-8, 1994, San Francisco, California, U.S.A. /editors, S.P. Murarka ... [et al.]. - Pittsburgh, Pa. :Materials Research Society,c1994. - xiv, 768 p. :ill. ;24 cm. - Materials Research Society symposium proceedings,v. 3370272-9172 ;. - Materials Research Society symposia proceedings ;v. 337..

Includes bibliographical references and indexes.

ISBN: 1558992375

LCCN: 94005418Subjects--Topical Terms:

669436
Metallic films
--congresses.

LC Class. No.: TK7871.85 / .A3483 1994

Dewey Class. No.: 621.3815/2

Advanced metallization for devices and circuits--science, technology, and manufacturability : = symposium held April 4-8, 1994, San Francisco, California, U.S.A. /
LDR:00763nam a2200193 a 45 001 652354
003 DLC
005 19941014130905.2
008 940620s1994 paua b 101 0 eng
010 $a 94005418
020 $a 1558992375
035 $a dt 00012593
040 $a DLC $c DLC $d DLC
050 0 0 $a TK7871.85 $b .A3483 1994
082 0 0 $a 621.3815/2 $2 20
245 0 0 $a Advanced metallization for devices and circuits--science, technology, and manufacturability : $b symposium held April 4-8, 1994, San Francisco, California, U.S.A. / $c editors, S.P. Murarka ... [et al.].
260 $a Pittsburgh, Pa. : $c c1994. $b Materials Research Society,
300 $a xiv, 768 p. : $b ill. ; $c 24 cm.
490 1 $a Materials Research Society symposium proceedings, $x 0272-9172 ; $v v. 337
504 $a Includes bibliographical references and indexes.
650 $a Metallic films $x congresses. $3 669436
650 $a Metallizing $x Congresses. $3 669437
650 $a Semiconductors $x Design and construction $x Congresses. $3 669438
700 $a Murarka, S. P. $3 656679
830 $a Materials Research Society symposia proceedings ; $v v. 337. $3 669439