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Fundamentals of semiconductor proces...
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El-Kareh, Badih.
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Fundamentals of semiconductor processing technology /
紀錄類型:
書目-語言資料,印刷品 : Monograph/item
正題名/作者:
Fundamentals of semiconductor processing technology // by Badih El-Kareh ; graphics and layout, Richard J. Bombard.
作者:
El-Kareh, Badih.
出版者:
Boston :Kluwer Academic Publishers, : c1995.,
面頁冊數:
xii, 599 p. :ill. ;25 cm.
附註:
Cover title: Fundamentals of semiconductor processing technologies.
標題:
Manufacturing processes. -
ISBN:
0792395344 (acid-free paper)
Fundamentals of semiconductor processing technology /
El-Kareh, Badih.
Fundamentals of semiconductor processing technology /
by Badih El-Kareh ; graphics and layout, Richard J. Bombard. - Boston :Kluwer Academic Publishers,c1995. - xii, 599 p. :ill. ;25 cm.
Cover title: Fundamentals of semiconductor processing technologies.
Includes bibliographical references and index.
ISBN: 0792395344 (acid-free paper)
LCCN: 94037113Subjects--Topical Terms:
613090
Manufacturing processes.
LC Class. No.: TK7871.85 / .E45 1995
Dewey Class. No.: 621.3815/2
Fundamentals of semiconductor processing technology /
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by Badih El-Kareh ; graphics and layout, Richard J. Bombard.
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Fundamentals of semiconductor processing technologies.
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