東華大學圖書館 |

Programmable Nano-Photonics With Electrically Controlled Phase-Change Materials /

Record Type:	Electronic resources : Monograph/item
Title/Author:	Programmable Nano-Photonics With Electrically Controlled Phase-Change Materials // Rui Chen.
Author:	Chen, Rui,
Description:	1 electronic resource (191 pages)
Notes:	Source: Dissertations Abstracts International, Volume: 86-10, Section: B.
Contained By:	Dissertations Abstracts International86-10B.
Subject:	Optics. -
Online resource:	https://pqdd.sinica.edu.tw/twdaoapp/servlet/advanced?query=31840810
ISBN:	9798310399174

Programmable Nano-Photonics With Electrically Controlled Phase-Change Materials /
Chen, Rui,

Programmable Nano-Photonics With Electrically Controlled Phase-Change Materials /Rui Chen. - 1 electronic resource (191 pages)

Source: Dissertations Abstracts International, Volume: 86-10, Section: B.

Programmable nano-photonics have the potential to completely transform a range of emerging applications, including optical computing, optical signal processing, light detecting and ranging, and quantum applications. However, implementing energy-efficient and large-scale systems remains elusive because commonly used programmable photonic approaches are volatile and energy-hungry. Recent results on non-volatile phase-change material integrated photonics present a promising opportunity to create truly programmable nano-photonics. The ability to drastically change the refractive index of the PCMs in a non-volatile fashion allows creating programmable units with zero-static energy. By taking advantage of the electrical control, non-volatile reconfiguration, and zero crosstalk between each unit, PCMs can enable both extremely large-scale integrated photonics and metasurfaces.In this dissertation, we present our main progress in PCM nano-photonics and discuss the challenges and limitations of this emerging technology. We first demonstrated 2 x 2 electrically programmable units using a well-studied, prototypical PCM Ge2Sb2Te5 and scalable doped silicon PIN heaters. These components exhibit low insertion loss (~2 dB), high extinction ratio (8 dB), and large endurance (> 2,800 cycles), and are critical for large-scale photonic networks and photonic field programmable arrays. We also designed a three-waveguide directional coupler multiple operation levels by adding a detuning parameter between the center and the other waveguides. To further reduce the loss, we explored an emerging PCM Sb2S3 with lower absorption loss and demonstrated phase shifters in both micro-ring resonators and Mach-Zehnder interferometers. An asymmetric directional coupler with two waveguides is also experimentally demonstrated, showing better loss (~1 dB) and extinction ratio (~ 15 dB) than the GST one. Interestingly, the device also supported a stepwise multi-level switching behavior, which offered unique opportunity for deterministic tuning, and we showed 32 levels with excellent repeatability. With this multilevel operation, we demonstrate an application of post-fabrication trimming to correct the phase error in a balanced MZI. Beyond the university level, in-house fabrication, which relies on electron beam lithography and has limited scalability, we also cooperated with Intel and showed a scalable process to put PCMs on commercial 300-mm silicon photonic wafers.Active metasurfaces are another emerging field in nanophotonics. However, current electrically controlled PCM-based metasurfaces are limited to global amplitude modulation, insufficient for SLMs. We demonstrated an individual-pixel addressable, transmissive metasurface using the low-loss PCM Sb2Se3 and doped silicon nanowire heaters. The nanowires simultaneously form a diatomic metasurface, supporting a high quality-factor (~406) quasi-bound-state-in-the-continuum mode. Global phase-only modulation of ~0.25π (~0.2π) in simulation (experiment) is achieved, showing ten times enhancement. 2π phase shift is further obtained using a guided-mode resonance with enhanced light-Sb2Se3 interaction. Finally, individual-pixel addressability and SLM functionality are demonstrated through deterministic multilevel switching (ten levels) and tunable far-field beam shaping. Our work presents zero-static power transmissive phase-only SLMs, enabled by electrically controlled low-loss PCMs and individual meta-molecule addressable metasurfaces.As a perspective, we argue that energy efficiency is a more critical parameter than the operating speed for programmable photonics, making PCMs an ideal candidate. This has the potential for a disruptive paradigm shift in the reconfigurable photonics research philosophy, as slow but energy-efficient and large index modulation can provide a better solution for extremely large-scale integrated photonics than fast but power-hungry, small index tuning methods. We also highlight the exciting opportunities to leverage wide bandgap PCMs for visible-wavelength applications, such as quantum photonics and optogenetics, and for rewritable photonic integrated circuits using nanosecond pulsed lasers. The latter can dramatically reduce the fabrication cost of PICs and democratize the PIC manufacturing process for rapid prototyping.

English

ISBN: 9798310399174Subjects--Topical Terms:

517925
Optics.
Subjects--Index Terms:

Metasurfaces

Programmable Nano-Photonics With Electrically Controlled Phase-Change Materials /
LDR:05775nmm a22004333i 4500 001 2434805
005 20251001062529.5
006 m o d
007 cr|nu||||||||
008 261011s2025 miu||||||m |||||||eng d
020 $a 9798310399174
035 $a (MiAaPQD)AAI31840810
035 $a AAI31840810
040 $a MiAaPQD $b eng $c MiAaPQD $e rda
100 1 $a Chen, Rui, $e author. $3 3824914
245 1 0 $a Programmable Nano-Photonics With Electrically Controlled Phase-Change Materials / $c Rui Chen.
264 1 $a Ann Arbor : $b ProQuest Dissertations & Theses, $c 2025
300 $a 1 electronic resource (191 pages)
336 $a text $b txt $2 rdacontent
337 $a computer $b c $2 rdamedia
338 $a online resource $b cr $2 rdacarrier
500 $a Source: Dissertations Abstracts International, Volume: 86-10, Section: B.
500 $a Advisors: Majumdar, Arka Committee members: Li, Mo; Moazeni, Sajjad; Bergsman, David S.
502 $b Ph.D. $c University of Washington $d 2025.
520 $a Programmable nano-photonics have the potential to completely transform a range of emerging applications, including optical computing, optical signal processing, light detecting and ranging, and quantum applications. However, implementing energy-efficient and large-scale systems remains elusive because commonly used programmable photonic approaches are volatile and energy-hungry. Recent results on non-volatile phase-change material integrated photonics present a promising opportunity to create truly programmable nano-photonics. The ability to drastically change the refractive index of the PCMs in a non-volatile fashion allows creating programmable units with zero-static energy. By taking advantage of the electrical control, non-volatile reconfiguration, and zero crosstalk between each unit, PCMs can enable both extremely large-scale integrated photonics and metasurfaces.In this dissertation, we present our main progress in PCM nano-photonics and discuss the challenges and limitations of this emerging technology. We first demonstrated 2 x 2 electrically programmable units using a well-studied, prototypical PCM Ge2Sb2Te5 and scalable doped silicon PIN heaters. These components exhibit low insertion loss (~2 dB), high extinction ratio (8 dB), and large endurance (> 2,800 cycles), and are critical for large-scale photonic networks and photonic field programmable arrays. We also designed a three-waveguide directional coupler multiple operation levels by adding a detuning parameter between the center and the other waveguides. To further reduce the loss, we explored an emerging PCM Sb2S3 with lower absorption loss and demonstrated phase shifters in both micro-ring resonators and Mach-Zehnder interferometers. An asymmetric directional coupler with two waveguides is also experimentally demonstrated, showing better loss (~1 dB) and extinction ratio (~ 15 dB) than the GST one. Interestingly, the device also supported a stepwise multi-level switching behavior, which offered unique opportunity for deterministic tuning, and we showed 32 levels with excellent repeatability. With this multilevel operation, we demonstrate an application of post-fabrication trimming to correct the phase error in a balanced MZI. Beyond the university level, in-house fabrication, which relies on electron beam lithography and has limited scalability, we also cooperated with Intel and showed a scalable process to put PCMs on commercial 300-mm silicon photonic wafers.Active metasurfaces are another emerging field in nanophotonics. However, current electrically controlled PCM-based metasurfaces are limited to global amplitude modulation, insufficient for SLMs. We demonstrated an individual-pixel addressable, transmissive metasurface using the low-loss PCM Sb2Se3 and doped silicon nanowire heaters. The nanowires simultaneously form a diatomic metasurface, supporting a high quality-factor (~406) quasi-bound-state-in-the-continuum mode. Global phase-only modulation of ~0.25π (~0.2π) in simulation (experiment) is achieved, showing ten times enhancement. 2π phase shift is further obtained using a guided-mode resonance with enhanced light-Sb2Se3 interaction. Finally, individual-pixel addressability and SLM functionality are demonstrated through deterministic multilevel switching (ten levels) and tunable far-field beam shaping. Our work presents zero-static power transmissive phase-only SLMs, enabled by electrically controlled low-loss PCMs and individual meta-molecule addressable metasurfaces.As a perspective, we argue that energy efficiency is a more critical parameter than the operating speed for programmable photonics, making PCMs an ideal candidate. This has the potential for a disruptive paradigm shift in the reconfigurable photonics research philosophy, as slow but energy-efficient and large index modulation can provide a better solution for extremely large-scale integrated photonics than fast but power-hungry, small index tuning methods. We also highlight the exciting opportunities to leverage wide bandgap PCMs for visible-wavelength applications, such as quantum photonics and optogenetics, and for rewritable photonic integrated circuits using nanosecond pulsed lasers. The latter can dramatically reduce the fabrication cost of PICs and democratize the PIC manufacturing process for rapid prototyping.
546 $a English
590 $a School code: 0250
650 4 $a Optics. $3 517925
650 4 $a Electrical engineering. $3 649834
650 4 $a Materials science. $3 543314
650 4 $a Nanoscience. $3 587832
653 $a Metasurfaces
653 $a Phase change materials
653 $a Programmable photonics
653 $a Silicon photonics
690 $a 0752
690 $a 0794
690 $a 0544
690 $a 0565
710 2 $a University of Washington. $b Electrical and Computer Engineering. $e degree granting institution. $3 3765649
720 1 $a Majumdar, Arka $e degree supervisor.
773 0 $t Dissertations Abstracts International $g 86-10B.
790 $a 0250
791 $a Ph.D.
792 $a 2025
856 4 0 $u https://pqdd.sinica.edu.tw/twdaoapp/servlet/advanced?query=31840810