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Fundamental Processes in Initiated C...

Shindler, Simon,

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Fundamental Processes in Initiated Chemical Vapor Deposition /

紀錄類型:	書目-電子資源 : Monograph/item
正題名/作者:	Fundamental Processes in Initiated Chemical Vapor Deposition // Simon Shindler.
作者:	Shindler, Simon,
面頁冊數:	1 electronic resource (248 pages)
附註:	Source: Dissertations Abstracts International, Volume: 86-12, Section: B.
Contained By:	Dissertations Abstracts International86-12B.
標題:	Chemical engineering. -
電子資源:	https://pqdd.sinica.edu.tw/twdaoapp/servlet/advanced?query=31841330
ISBN:	9798283138329

Fundamental Processes in Initiated Chemical Vapor Deposition /
Shindler, Simon,

Fundamental Processes in Initiated Chemical Vapor Deposition /Simon Shindler. - 1 electronic resource (248 pages)

Source: Dissertations Abstracts International, Volume: 86-12, Section: B.

Polymer chemical vapor deposition (CVD) offers superior conformality and substrate compatibility compared to solution-based thin film fabrication. Unique among polymer CVD processes, initiated CVD (iCVD) decouples radical generating reactions from polymerization reactions, enabling use of mild conditions, and diverse polymer chemistries. Most iCVD research falls into one of three categories: (i) implementation, (ii) process innovations, and (iii) post-deposition modifications. This dissertation targets critical knowledge gaps in these areas by investigating the fundamental processes relevant to them. Beginning with implementation, Chapter 2 addresses the gap in understanding of defects which might pose a risk to use of iCVD in industries requiring smooth, uniform films, such as optical coatings and soft electronics. Films fabricated using iCVD at sample temperatures below ~30oC are shown to be susceptible to defects originating from build-up of oligomeric species (n < 10) and prevention methods are developed. Chapters 3 and 4 address the understudied iCVD vapor phase. Even though innovations like batch iCVD and condensed droplet polymerization were built on understanding of the vapor phase, no models of the iCVD vapor phase have been validated experimentally. Chapter 3 first investigates heat transfer and mixing in the iCVD reactor, introducing the Peclet and Knudsen numbers to quantify these effects. Chapter 4 then thoroughly characterizes the reactive vapor phase, developing a robust model of initiator (di-tert-butyl peroxide) decomposition at a range of flowrates, pressures, temperatures and monomer (cyclohexyl methacrylate) compositions. Moving to post-deposition modification, Chapter 5 investigates post-deposition base catalyzed hydrolysis of two fluoro acrylic polymers. The high pH conditions required to hydrolyze the passivating fluoroacrylate moiety pushes the limits of post-deposition modification. Quantification of hydrolysis kinetics shows that both crosslinking and covalently grafting the film to the substrate are necessary. The eventual degradation of the grafting agent indicates a need for improved grafting procedures.

English

ISBN: 9798283138329Subjects--Topical Terms:

560457
Chemical engineering.
Subjects--Index Terms:

Heat transfer

Fundamental Processes in Initiated Chemical Vapor Deposition /
LDR:03587nmm a22004453i 4500 001 2434205
005 20250912100616.5
006 m o d
007 cr|nu||||||||
008 261011s2025 miu||||||m |||||||eng d
020 $a 9798283138329
035 $a (MiAaPQD)AAI31841330
035 $a AAI31841330
040 $a MiAaPQD $b eng $c MiAaPQD $e rda
100 1 $a Shindler, Simon, $e author. $0 (orcid)0000-0002-7396-2476 $3 3824108
245 1 0 $a Fundamental Processes in Initiated Chemical Vapor Deposition / $c Simon Shindler.
264 1 $a Ann Arbor : $b ProQuest Dissertations & Theses, $c 2025
300 $a 1 electronic resource (248 pages)
336 $a text $b txt $2 rdacontent
337 $a computer $b c $2 rdamedia
338 $a online resource $b cr $2 rdacarrier
500 $a Source: Dissertations Abstracts International, Volume: 86-12, Section: B.
500 $a Advisors: Yang, Rong Committee members: Tester, Jefferson; Wiesner, Ulrich.
502 $b Ph.D. $c Cornell University $d 2025.
520 $a Polymer chemical vapor deposition (CVD) offers superior conformality and substrate compatibility compared to solution-based thin film fabrication. Unique among polymer CVD processes, initiated CVD (iCVD) decouples radical generating reactions from polymerization reactions, enabling use of mild conditions, and diverse polymer chemistries. Most iCVD research falls into one of three categories: (i) implementation, (ii) process innovations, and (iii) post-deposition modifications. This dissertation targets critical knowledge gaps in these areas by investigating the fundamental processes relevant to them. Beginning with implementation, Chapter 2 addresses the gap in understanding of defects which might pose a risk to use of iCVD in industries requiring smooth, uniform films, such as optical coatings and soft electronics. Films fabricated using iCVD at sample temperatures below ~30oC are shown to be susceptible to defects originating from build-up of oligomeric species (n < 10) and prevention methods are developed. Chapters 3 and 4 address the understudied iCVD vapor phase. Even though innovations like batch iCVD and condensed droplet polymerization were built on understanding of the vapor phase, no models of the iCVD vapor phase have been validated experimentally. Chapter 3 first investigates heat transfer and mixing in the iCVD reactor, introducing the Peclet and Knudsen numbers to quantify these effects. Chapter 4 then thoroughly characterizes the reactive vapor phase, developing a robust model of initiator (di-tert-butyl peroxide) decomposition at a range of flowrates, pressures, temperatures and monomer (cyclohexyl methacrylate) compositions. Moving to post-deposition modification, Chapter 5 investigates post-deposition base catalyzed hydrolysis of two fluoro acrylic polymers. The high pH conditions required to hydrolyze the passivating fluoroacrylate moiety pushes the limits of post-deposition modification. Quantification of hydrolysis kinetics shows that both crosslinking and covalently grafting the film to the substrate are necessary. The eventual degradation of the grafting agent indicates a need for improved grafting procedures.
546 $a English
590 $a School code: 0058
650 4 $a Chemical engineering. $3 560457
650 4 $a Chemistry. $3 516420
650 4 $a Engineering. $3 586835
650 4 $a Polymer chemistry. $3 3173488
653 $a Heat transfer
653 $a Kinetics
653 $a Fluoro acrylic polymers
653 $a Vacuum
653 $a Chemical vapor deposition
690 $a 0542
690 $a 0537
690 $a 0495
690 $a 0485
710 2 $a Cornell University. $b Chemical Engineering. $e degree granting institution. $3 3820066
720 1 $a Yang, Rong $e degree supervisor.
773 0 $t Dissertations Abstracts International $g 86-12B.
790 $a 0058
791 $a Ph.D.
792 $a 2025
856 4 0 $u https://pqdd.sinica.edu.tw/twdaoapp/servlet/advanced?query=31841330