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Tabletop Coherent Extreme Ultraviole...

Jenkins, Nicholas Wilhelm,

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Tabletop Coherent Extreme Ultraviolet Metrology and Imaging of Nanostructures /

Record Type:	Electronic resources : Monograph/item
Title/Author:	Tabletop Coherent Extreme Ultraviolet Metrology and Imaging of Nanostructures // Nicholas Wilhelm Jenkins.
Author:	Jenkins, Nicholas Wilhelm,
Description:	1 electronic resource (193 pages)
Notes:	Source: Dissertations Abstracts International, Volume: 86-03, Section: B.
Contained By:	Dissertations Abstracts International86-03B.
Subject:	Optics. -
Online resource:	https://pqdd.sinica.edu.tw/twdaoapp/servlet/advanced?query=31298546
ISBN:	9798384052371

Tabletop Coherent Extreme Ultraviolet Metrology and Imaging of Nanostructures /
Jenkins, Nicholas Wilhelm,

Tabletop Coherent Extreme Ultraviolet Metrology and Imaging of Nanostructures /Nicholas Wilhelm Jenkins. - 1 electronic resource (193 pages)

Source: Dissertations Abstracts International, Volume: 86-03, Section: B.

Nanoscale fabrication has progressed to the level where detailed near-nanometer structures can be routinely produced. As fabrication scales shrink to atomistic scales, a corresponding need for high-precision characterization is in demand. Extreme ultraviolet light (EUV) for patterning small- scale features has seen considerable development and application in recent years. Similarly, EUV light offers outstanding advantages for characterization and metrology. In particular, by utilizing a coherent EUV source, detailed nanoscale features can be assessed in a variety of measurement modes. Coherent EUV light is now readily accessible in a tabletop environment with significant advances in high-harmonic generation. Utilizing a coherent EUV source allows access to traditional reflectometry and diffraction-based measurements which can be combined for information-rich measurements. This work presents a multitude of applications of coherent tabletop HHG-based light sources for the characterization of industrially relevant samples.

English

ISBN: 9798384052371Subjects--Topical Terms:

517925
Optics.
Subjects--Index Terms:

Coherent diffractive imaging

Tabletop Coherent Extreme Ultraviolet Metrology and Imaging of Nanostructures /
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245 1 0 $a Tabletop Coherent Extreme Ultraviolet Metrology and Imaging of Nanostructures / $c Nicholas Wilhelm Jenkins.
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300 $a 1 electronic resource (193 pages)
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500 $a Source: Dissertations Abstracts International, Volume: 86-03, Section: B.
500 $a Advisors: Murnane, Margaret M. Committee members: Kapteyn, Henry C.; Smalyukh, Ivan; Perkins, Tom; Jimenez, Ralph; Yazdi, Sadegh.
502 $b Ph.D. $c University of Colorado at Boulder $d 2024.
520 $a Nanoscale fabrication has progressed to the level where detailed near-nanometer structures can be routinely produced. As fabrication scales shrink to atomistic scales, a corresponding need for high-precision characterization is in demand. Extreme ultraviolet light (EUV) for patterning small- scale features has seen considerable development and application in recent years. Similarly, EUV light offers outstanding advantages for characterization and metrology. In particular, by utilizing a coherent EUV source, detailed nanoscale features can be assessed in a variety of measurement modes. Coherent EUV light is now readily accessible in a tabletop environment with significant advances in high-harmonic generation. Utilizing a coherent EUV source allows access to traditional reflectometry and diffraction-based measurements which can be combined for information-rich measurements. This work presents a multitude of applications of coherent tabletop HHG-based light sources for the characterization of industrially relevant samples.
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590 $a School code: 0051
650 4 $a Optics. $3 517925
650 4 $a Physics. $3 516296
650 4 $a Materials science. $3 543314
650 4 $a Applied physics. $3 3343996
653 $a Coherent diffractive imaging
653 $a Extreme ultraviolet light
653 $a High-harmonic generation
653 $a Low-dose
653 $a Metrology
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690 $a 0605
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710 2 $a University of Colorado at Boulder. $b Physics. $e degree granting institution. $3 3765727
720 1 $a Murnane, Margaret M. $e degree supervisor.
773 0 $t Dissertations Abstracts International $g 86-03B.
790 $a 0051
791 $a Ph.D.
792 $a 2024
856 4 0 $u https://pqdd.sinica.edu.tw/twdaoapp/servlet/advanced?query=31298546