東華大學圖書館 |

Language: English

Help

回圖書館首頁

手機版館藏查詢

Back

Switch To: Labeled | MARC Mode | ISBD

Exploration of Sputtered Thin Films-...

Roychowdhury, Tuhin,

Linked to FindBook

Google Book

Amazon

博客來

Exploration of Sputtered Thin Films-E.g., in Sample Preparation and Material Characterization /

Record Type:	Electronic resources : Monograph/item
Title/Author:	Exploration of Sputtered Thin Films-E.g., in Sample Preparation and Material Characterization // Tuhin Roychowdhury.
Author:	Roychowdhury, Tuhin,
Description:	1 electronic resource (312 pages)
Notes:	Source: Dissertations Abstracts International, Volume: 83-07, Section: B.
Contained By:	Dissertations Abstracts International83-07B.
Subject:	Polymers. -
Online resource:	https://pqdd.sinica.edu.tw/twdaoapp/servlet/advanced?query=28926374
ISBN:	9798762120159

Exploration of Sputtered Thin Films-E.g., in Sample Preparation and Material Characterization /
Roychowdhury, Tuhin,

Exploration of Sputtered Thin Films-E.g., in Sample Preparation and Material Characterization /Tuhin Roychowdhury. - 1 electronic resource (312 pages)

Source: Dissertations Abstracts International, Volume: 83-07, Section: B.

My dissertation focuses on (i) the development sputtered films for solid phase microextraction (SPME) and (ii) the comprehensive characterization of materials using a suite of analytical techniques. Chapter 1 reviews the basics of SPME. This chapter also contains (i) a discussion of various sputtering techniques, (ii) a discussion of two techniques I focused on most of my work: spectroscopic ellipsometry (SE) and X-ray photoelectron spectroscopy (XPS). Chapter 2 focuses the major part of my work, which is to prepare new solid phases/adsorbents for SPME via silicon sputtering followed by thermal deposition of a polymer, polydimethylsiloxane (PDMS). PDMS was deposited by a simple gas phase technique which has never before been applied to prepare SPME stationary phases. The coatings were characterized by time-of-flight mass spectrometry (ToF-SIMS), XPS, scanning electron microscopy (SEM), SE, and contact angle goniometry. The extraction efficiencies of ca. 1.8 Aµm sputtered, PDMS-coated fibers were compared to a commercial fiber (7 Aµm PDMS) for a series of polycyclic hydrocarbons (PAHs). Large carry-over and phase bleed peaks are observed in case of commercial PDMS-based SPME coatings, which decrease the lifetime and usefulness of these fibers. It is of great significance that our sputtered fibers exhibit very small or negligible carry-over peaks and phase bleed peaks under the same conditions. Chapter 3 focuses on the multi-instrument characterization of copper and tungsten films sputtered by direct current magnetron sputtering (DCMS) and high-power impulse magnetron sputtering (HiPIMS) using a modern sputter source. The resulting films were characterized by energy dispersive X-ray spectroscopy (EDX), XPS, SEM, atomic force microscopy (AFM), SE, and X-ray diffraction (XRD). By EDX and XPS, all the sputtered films only showed the expected metal peaks. By XPS, the surfaces sputtered by DCMS were richer in oxygen than those produced by HiPIMS. By AFM, both surfaces were quite smooth. By SEM, the HiPIMS films exhibited smaller grain sizes, which was further confirmed by XRD. The crystallite sizes estimated by XRD are as follows: 18.2 nm (W, HiPIMS), 27.3 nm (W, DCMS), 40.2 nm (Cu, HiPIMS), and 58.9 nm (Cu, DCMS). By SE, the HiPIMS surfaces showed higher refractive indices, which suggested that they were denser and less oxidized than the DCMS surfaces. Chapter 4 reports characterization of liquid PDMS via SE, which required some experimental adaptations. The transmission measurements were obtained via a dual cuvette approach that eliminated the effects of the cuvettes and their interfaces. Only the reflection measurements were modeled with a Sellmeier function which produced decent fits. Chapters 5 consists of contributions to Surface Science Spectra (SSS) of near-ambient XPS spectra of various unconventional materials including cheese, kidney stone, sesame seeds, clamshell, and calcite. This dissertation also contains appendices of tutorial articles I wrote on ellipsometry and vacuum equipment.

English

ISBN: 9798762120159Subjects--Topical Terms:

535398
Polymers.

Exploration of Sputtered Thin Films-E.g., in Sample Preparation and Material Characterization /
LDR:04434nmm a22003973i 4500 001 2428395
005 20250410083448.5
006 m o d
007 cr|nu||||||||
008 261011s2019 miu||||||m |||||||eng d
020 $a 9798762120159
035 $a (MiAaPQD)AAI28926374
035 $a (MiAaPQD)BrighamYoung10285
035 $a AAI28926374
040 $a MiAaPQD $b eng $c MiAaPQD $e rda
100 1 $a Roychowdhury, Tuhin, $e author. $3 3815578
245 1 0 $a Exploration of Sputtered Thin Films-E.g., in Sample Preparation and Material Characterization / $c Tuhin Roychowdhury.
264 1 $a Ann Arbor : $b ProQuest Dissertations & Theses, $c 2019
300 $a 1 electronic resource (312 pages)
336 $a text $b txt $2 rdacontent
337 $a computer $b c $2 rdamedia
338 $a online resource $b cr $2 rdacarrier
500 $a Source: Dissertations Abstracts International, Volume: 83-07, Section: B.
500 $a Advisors: Linford, Matthew R. Committee members: Austin, Daniel E. ; Davis, Robert C. ; Dearden, David V. .
502 $b Ph.D. $c Brigham Young University $d 2019.
520 $a My dissertation focuses on (i) the development sputtered films for solid phase microextraction (SPME) and (ii) the comprehensive characterization of materials using a suite of analytical techniques. Chapter 1 reviews the basics of SPME. This chapter also contains (i) a discussion of various sputtering techniques, (ii) a discussion of two techniques I focused on most of my work: spectroscopic ellipsometry (SE) and X-ray photoelectron spectroscopy (XPS). Chapter 2 focuses the major part of my work, which is to prepare new solid phases/adsorbents for SPME via silicon sputtering followed by thermal deposition of a polymer, polydimethylsiloxane (PDMS). PDMS was deposited by a simple gas phase technique which has never before been applied to prepare SPME stationary phases. The coatings were characterized by time-of-flight mass spectrometry (ToF-SIMS), XPS, scanning electron microscopy (SEM), SE, and contact angle goniometry. The extraction efficiencies of ca. 1.8 Aµm sputtered, PDMS-coated fibers were compared to a commercial fiber (7 Aµm PDMS) for a series of polycyclic hydrocarbons (PAHs). Large carry-over and phase bleed peaks are observed in case of commercial PDMS-based SPME coatings, which decrease the lifetime and usefulness of these fibers. It is of great significance that our sputtered fibers exhibit very small or negligible carry-over peaks and phase bleed peaks under the same conditions. Chapter 3 focuses on the multi-instrument characterization of copper and tungsten films sputtered by direct current magnetron sputtering (DCMS) and high-power impulse magnetron sputtering (HiPIMS) using a modern sputter source. The resulting films were characterized by energy dispersive X-ray spectroscopy (EDX), XPS, SEM, atomic force microscopy (AFM), SE, and X-ray diffraction (XRD). By EDX and XPS, all the sputtered films only showed the expected metal peaks. By XPS, the surfaces sputtered by DCMS were richer in oxygen than those produced by HiPIMS. By AFM, both surfaces were quite smooth. By SEM, the HiPIMS films exhibited smaller grain sizes, which was further confirmed by XRD. The crystallite sizes estimated by XRD are as follows: 18.2 nm (W, HiPIMS), 27.3 nm (W, DCMS), 40.2 nm (Cu, HiPIMS), and 58.9 nm (Cu, DCMS). By SE, the HiPIMS surfaces showed higher refractive indices, which suggested that they were denser and less oxidized than the DCMS surfaces. Chapter 4 reports characterization of liquid PDMS via SE, which required some experimental adaptations. The transmission measurements were obtained via a dual cuvette approach that eliminated the effects of the cuvettes and their interfaces. Only the reflection measurements were modeled with a Sellmeier function which produced decent fits. Chapters 5 consists of contributions to Surface Science Spectra (SSS) of near-ambient XPS spectra of various unconventional materials including cheese, kidney stone, sesame seeds, clamshell, and calcite. This dissertation also contains appendices of tutorial articles I wrote on ellipsometry and vacuum equipment.
546 $a English
590 $a School code: 0022
650 4 $a Polymers. $3 535398
650 4 $a Mass spectrometry. $3 551172
650 4 $a Software. $2 gtt. $3 619355
650 4 $a Fourier transforms. $3 3545926
650 4 $a Solvents. $3 620946
650 4 $a Chemical vapor deposition. $3 621056
650 4 $a Silicon wafers. $3 3681738
650 4 $a Stainless steel. $3 3560388
650 4 $a Scientific imaging. $3 3560377
650 4 $a Chromatography. $3 1073639
650 4 $a Potassium. $3 3562093
650 4 $a Contact angle. $3 3320098
650 4 $a Thin films. $3 626403
650 4 $a Scanning electron microscopy. $3 551366
650 4 $a Analytical chemistry. $3 3168300
650 4 $a Chemistry. $3 516420
650 4 $a Computer science. $3 523869
650 4 $a Condensed matter physics. $3 3173567
690 $a 0486
690 $a 0485
690 $a 0984
690 $a 0611
710 2 $a Brigham Young University. $e degree granting institution. $3 3767549
720 1 $a Linford, Matthew R. $e degree supervisor.
773 0 $t Dissertations Abstracts International $g 83-07B.
790 $a 0022
791 $a Ph.D.
792 $a 2019
856 4 0 $u https://pqdd.sinica.edu.tw/twdaoapp/servlet/advanced?query=28926374