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Handbook of plasma processing techno...

Rossnagel, Stephen M.

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Handbook of plasma processing technology : = fundamentals, etching, deposition, and surface interactions /

紀錄類型:	書目-語言資料,印刷品 : Monograph/item
正題名/作者:	Handbook of plasma processing technology :/ edited by Stephen M. Rossnagel, Jerome J. Cuomo, William D. Westwood.
其他題名:	fundamentals, etching, deposition, and surface interactions /
其他作者:	Rossnagel, Stephen M.
出版者:	Park Ridge, N.J., U.S.A. :Noyes Publications, : c1990.,
面頁冊數:	xxiii, 523 p. :ill. ;25 cm
叢書名:	Materials science and process technology series
標題:	Plasma engineering. -
電子資源:	http://www.loc.gov/catdir/description/wap041/89022834.html
ISBN:	0815512201 :

Handbook of plasma processing technology : = fundamentals, etching, deposition, and surface interactions /
Handbook of plasma processing technology :fundamentals, etching, deposition, and surface interactions /edited by Stephen M. Rossnagel, Jerome J. Cuomo, William D. Westwood. - Park Ridge, N.J., U.S.A. :Noyes Publications,c1990. - xxiii, 523 p. :ill. ;25 cm - Materials science and process technology series.

Includes bibliographical references.

ISBN: 0815512201 :$86.00

LCCN: 89022834 Subjects--Topical Terms:

674159
Plasma engineering.

LC Class. No.: TA2020 / .H37 1990

Dewey Class. No.: 621.044

Handbook of plasma processing technology : = fundamentals, etching, deposition, and surface interactions /
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700 1 # $a Westwood, William D. $q (William Dickson), $d 1937- $3 3808586
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