東華大學圖書館 |

Language: English

Help

回圖書館首頁

手機版館藏查詢

Back

Switch To: Labeled | MARC Mode | ISBD

Linked to FindBook

Google Book

Amazon

博客來

Photoresist technology in microsystems = principles, processes and applications /

Record Type:	Electronic resources : Monograph/item
Title/Author:	Photoresist technology in microsystems/ by Kaiying Wang.
Reminder of title:	principles, processes and applications /
Author:	Wang, Kaiying.
Published:	Singapore :Springer Nature Singapore : : 2025.,
Description:	xii, 183 p. :ill., digital ;24 cm.
[NT 15003449]:	1. Introduction to Photoresist Technology -- 2. Fundamentals of Photoresist Chemistry -- 3. Microsystems Fabrication Processes -- 4. Advanced Photoresist Materials for Microsystems -- 5. Photoresist Processing Techniques -- 6. Photoresist Applications in Microsystems -- 7. High-Aspect-Ratio Lithography for Microsystems -- 8. Challenges in Photoresist Technology for Microsystems -- 9. Emerging Trends in Photoresist Technology -- 10. Future Perspectives.
Contained By:	Springer Nature eBook
Subject:	Photoresists. -
Online resource:	https://doi.org/10.1007/978-981-95-1606-3
ISBN:	9789819516063

Photoresist technology in microsystems = principles, processes and applications /
Wang, Kaiying.

Photoresist technology in microsystemsprinciples, processes and applications /[electronic resource] :by Kaiying Wang. - Singapore :Springer Nature Singapore :2025. - xii, 183 p. :ill., digital ;24 cm. - Springer series in advanced microelectronics,v. 152197-6643 ;. - Springer series in advanced microelectronics ;v. 15..

1. Introduction to Photoresist Technology -- 2. Fundamentals of Photoresist Chemistry -- 3. Microsystems Fabrication Processes -- 4. Advanced Photoresist Materials for Microsystems -- 5. Photoresist Processing Techniques -- 6. Photoresist Applications in Microsystems -- 7. High-Aspect-Ratio Lithography for Microsystems -- 8. Challenges in Photoresist Technology for Microsystems -- 9. Emerging Trends in Photoresist Technology -- 10. Future Perspectives.

This book presents a comprehensive overview of recent advances in photoresist technology, a cornerstone of modern microfabrication. Photoresists enable the precise patterning essential for creating microelectronic devices, MEMS, biomedical systems, and photonic components. As the demand for smaller, faster, and more efficient microsystems grows, the role of photoresists in achieving high-resolution patterning and complex 3D structures has become increasingly critical. However, despite its importance, there is a lack of comprehensive resources that bridge the gap between the fundamental principles of photoresist chemistry, advanced fabrication techniques, and their diverse applications. This book addresses this gap by providing a unified and up to-date exploration of photoresist technology, making it a timely and essential contribution to the field. The book balances theoretical depth with practical insights, making it accessible to readers with varying levels of expertise. The book is designed to cater to a broad audience, from students and researchers to industry professionals. A unique feature of this book is its emphasis on the interplay between material properties, processing techniques, and application-specific requirements.

ISBN: 9789819516063

Standard No.: 10.1007/978-981-95-1606-3doiSubjects--Topical Terms:

2179865
Photoresists.

LC Class. No.: TK7874

Dewey Class. No.: 621.381

Photoresist technology in microsystems = principles, processes and applications /
LDR:02772nmm a2200337 a 4500 001 2421609
003 DE-He213
005 20251014130414.0
006 m d
007 cr nn 008maaau
008 260505s2025 si s 0 eng d
020 $a 9789819516063 $q (electronic bk.)
020 $a 9789819516056 $q (paper)
024 7 $a 10.1007/978-981-95-1606-3 $2 doi
035 $a 978-981-95-1606-3
040 $a GP $c GP
041 0 $a eng
050 4 $a TK7874
072 7 $a TJF $2 bicssc
072 7 $a TEC027000 $2 bisacsh
072 7 $a TJF $2 thema
082 0 4 $a 621.381 $2 23
090 $a TK7874 $b .W246 2025
100 1 $a Wang, Kaiying. $3 3802715
245 1 0 $a Photoresist technology in microsystems $h [electronic resource] : $b principles, processes and applications / $c by Kaiying Wang.
260 $a Singapore : $b Springer Nature Singapore : $b Imprint: Springer, $c 2025.
300 $a xii, 183 p. : $b ill., digital ; $c 24 cm.
490 1 $a Springer series in advanced microelectronics, $x 2197-6643 ; $v v. 15
505 0 $a 1. Introduction to Photoresist Technology -- 2. Fundamentals of Photoresist Chemistry -- 3. Microsystems Fabrication Processes -- 4. Advanced Photoresist Materials for Microsystems -- 5. Photoresist Processing Techniques -- 6. Photoresist Applications in Microsystems -- 7. High-Aspect-Ratio Lithography for Microsystems -- 8. Challenges in Photoresist Technology for Microsystems -- 9. Emerging Trends in Photoresist Technology -- 10. Future Perspectives.
520 $a This book presents a comprehensive overview of recent advances in photoresist technology, a cornerstone of modern microfabrication. Photoresists enable the precise patterning essential for creating microelectronic devices, MEMS, biomedical systems, and photonic components. As the demand for smaller, faster, and more efficient microsystems grows, the role of photoresists in achieving high-resolution patterning and complex 3D structures has become increasingly critical. However, despite its importance, there is a lack of comprehensive resources that bridge the gap between the fundamental principles of photoresist chemistry, advanced fabrication techniques, and their diverse applications. This book addresses this gap by providing a unified and up to-date exploration of photoresist technology, making it a timely and essential contribution to the field. The book balances theoretical depth with practical insights, making it accessible to readers with varying levels of expertise. The book is designed to cater to a broad audience, from students and researchers to industry professionals. A unique feature of this book is its emphasis on the interplay between material properties, processing techniques, and application-specific requirements.
650 0 $a Photoresists. $3 2179865
650 1 4 $a Microsystems and MEMS. $3 3538640
650 2 4 $a Electronics and Microelectronics, Instrumentation. $3 893838
650 2 4 $a Polymers. $3 535398
650 2 4 $a Photochemistry. $3 592690
710 2 $a SpringerLink (Online service) $3 836513
773 0 $t Springer Nature eBook
830 0 $a Springer series in advanced microelectronics ; $v v. 15. $3 3802716
856 4 0 $u https://doi.org/10.1007/978-981-95-1606-3
950 $a Engineering (SpringerNature-11647)