Fabrication of micro/nano structures...
Zhang, Guoqing.

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  • Fabrication of micro/nano structures via precision machining = modelling, processing and evaluation /
  • Record Type: Electronic resources : Monograph/item
    Title/Author: Fabrication of micro/nano structures via precision machining/ edited by Guoqing Zhang ... [et al.].
    Reminder of title: modelling, processing and evaluation /
    other author: Zhang, Guoqing.
    Published: Singapore :Springer Nature Singapore : : 2023.,
    Description: xii, 398 p. :ill., digital ;24 cm.
    [NT 15003449]: Chapter 1. Introduction, Yuting Ma, Shuaikang Cao and Guoqing Zhang -- Chapter 2. Tool offset flycutting straight-groove-type micro structures, Jianpeng Wang and Guoqing Zhang -- Chapter 3. Tool offset flycutting multi-layer hierarchical microstructures, Shuai Ma and Guoqing Zhang -- Chapter 4. Tool offset flycutting micro-optics arrays with high-aspect-ratio, Zhanwen Sun and Suet To -- Chapter 5. Diamond milling system for fabricating infrared micro-optics arrays, Zhanwen Sun and Sujuan Wang -- Chapter 6. Cutting force and energy modelling in ultra-precision machining of micro-structures, Zhejia Zhao, Zhanwen Sun and Suet To.
    Contained By: Springer Nature eBook
    Subject: Micromachining. -
    Online resource: https://doi.org/10.1007/978-981-99-1338-1
    ISBN: 9789819913381
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