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Low-energy ion irradiation of materi...

Rauschenbach, Bernd.

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Low-energy ion irradiation of materials = fundamentals and application /

Record Type:	Electronic resources : Monograph/item
Title/Author:	Low-energy ion irradiation of materials/ by Bernd Rauschenbach.
Reminder of title:	fundamentals and application /
Author:	Rauschenbach, Bernd.
Published:	Cham :Springer International Publishing : : 2022.,
Description:	xxiv, 752 p. :ill. (some col.), digital ;24 cm.
[NT 15003449]:	1. Introduction -- 2. Collision processes -- 3. Energy-loss processes and ion range -- 4. Ion beam induced damage -- 5. Sputtering -- 6. Evolution of topography under low-energy ion bombardment -- 7. Ion beam figuring and smoothing -- 8. Ion beam deposition -- 9. Ion beam assisted deposition -- 10. Ion beam sputtering induced glancing angle deposition.
Contained By:	Springer Nature eBook
Subject:	Materials - Effect of radiation on. -
Online resource:	https://doi.org/10.1007/978-3-030-97277-6
ISBN:	9783030972776

Low-energy ion irradiation of materials = fundamentals and application /
Rauschenbach, Bernd.

Low-energy ion irradiation of materialsfundamentals and application /[electronic resource] :by Bernd Rauschenbach. - Cham :Springer International Publishing :2022. - xxiv, 752 p. :ill. (some col.), digital ;24 cm. - Springer series in materials science,v. 3242196-2812 ;. - Springer series in materials science ;v. 324..

1. Introduction -- 2. Collision processes -- 3. Energy-loss processes and ion range -- 4. Ion beam induced damage -- 5. Sputtering -- 6. Evolution of topography under low-energy ion bombardment -- 7. Ion beam figuring and smoothing -- 8. Ion beam deposition -- 9. Ion beam assisted deposition -- 10. Ion beam sputtering induced glancing angle deposition.

This book provides a comprehensive introduction to all aspects of low-energy ion-solid interaction from basic principles to advanced applications in materials science. It features a balanced and insightful approach to the fundamentals of the low-energy ion-solid surface interaction, focusing on relevant topics such as interaction potentials, kinetics of binary collisions, ion range, radiation damages, and sputtering. Additionally, the book incorporates key updates reflecting the latest relevant results of modern research on topics such as topography evolution and thin-film deposition under ion bombardment, ion beam figuring and smoothing, generation of nanostructures, and ion beam-controlled glancing angle deposition. Filling a gap of almost 20 years of relevant research activity, this book offers a wealth of information and up-to-date results for graduate students, academic researchers, and industrial scientists working in these areas.

ISBN: 9783030972776

Standard No.: 10.1007/978-3-030-97277-6doiSubjects--Topical Terms:

673011
Materials
--Effect of radiation on.

LC Class. No.: TA418.6 / .R38 2022

Dewey Class. No.: 620.11228

Low-energy ion irradiation of materials = fundamentals and application /
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490 1 $a Springer series in materials science, $x 2196-2812 ; $v v. 324
505 0 $a 1. Introduction -- 2. Collision processes -- 3. Energy-loss processes and ion range -- 4. Ion beam induced damage -- 5. Sputtering -- 6. Evolution of topography under low-energy ion bombardment -- 7. Ion beam figuring and smoothing -- 8. Ion beam deposition -- 9. Ion beam assisted deposition -- 10. Ion beam sputtering induced glancing angle deposition.
520 $a This book provides a comprehensive introduction to all aspects of low-energy ion-solid interaction from basic principles to advanced applications in materials science. It features a balanced and insightful approach to the fundamentals of the low-energy ion-solid surface interaction, focusing on relevant topics such as interaction potentials, kinetics of binary collisions, ion range, radiation damages, and sputtering. Additionally, the book incorporates key updates reflecting the latest relevant results of modern research on topics such as topography evolution and thin-film deposition under ion bombardment, ion beam figuring and smoothing, generation of nanostructures, and ion beam-controlled glancing angle deposition. Filling a gap of almost 20 years of relevant research activity, this book offers a wealth of information and up-to-date results for graduate students, academic researchers, and industrial scientists working in these areas.
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