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Design, fabrication and testing of a...

Beebe, David James.

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Design, fabrication and testing of a flexible silicon tactile sensor.

Record Type:	Electronic resources : Monograph/item
Title/Author:	Design, fabrication and testing of a flexible silicon tactile sensor./
Author:	Beebe, David James.
Published:	Ann Arbor : ProQuest Dissertations & Theses, : 1994,
Description:	225 p.
Notes:	Source: Dissertations Abstracts International, Volume: 76-02, Section: B.
Contained By:	Dissertations Abstracts International76-02B.
Subject:	Biomedical research. -
Online resource:	https://pqdd.sinica.edu.tw/twdaoapp/servlet/advanced?query=9431443

Design, fabrication and testing of a flexible silicon tactile sensor.
Beebe, David James.

Design, fabrication and testing of a flexible silicon tactile sensor. - Ann Arbor : ProQuest Dissertations & Theses, 1994 - 225 p.

Source: Dissertations Abstracts International, Volume: 76-02, Section: B.

Thesis (Ph.D.)--The University of Wisconsin - Madison, 1994.

This item must not be sold to any third party vendors.

This paper describes the development of a silicon-based force sensor packaged in a flexible polyimide package. The fabrication process is compatible with standard integrated circuit processes and produces a flexible package which sandwiches the metal leads between protective polyimide layers. The durability of the package is tested on human subjects. Silicon direct bonding and bulk micromachining (both isotropic and anisotropic) are utilized to fabricate the silicon sensing element. The sensing element consists of a circular diaphragm (200 $\\mu$m thick with a 2 mm radius) over a 10 $\\mu$m sealed cavity. The shallow cavity depth provides built-in overload protection. The diaphragm is instrumented with piezoresistors in a Wheatstone bridge configuration. Sensitivity to force is realized via the addition of a solid dome over the silicon diaphragm. The dome acts to transmit the applied force to the diaphragm. Torlon and epoxy domes are bench tested. The epoxy dome produces significant hysteresis, while the Torlon dome shows low hysteresis (2.4% of the mean output) and low nonrepeatability ($<$2.8% of the mean output). The Torlon dome is subjected to a variety of loads to investigate the sensor's performance. In all cases, force accounts for at least 99.2% of the total variance in the output. Output sensitivities of 1.4 mV/V/N are typical. The response is linear for low forces ($<$10-N) and becomes curvilinear at higher forces when the diaphragm bottoms out. The corner point between the linear and curvilinear portion of the output response can be controlled via diaphragm radius, diaphragm thickness and cavity depth. Details of the microfabrication and micromachining processes are presented along with characterization of the force sensor system. The sensor is tested on five human subjects. For dynamic calibration trials, 85% of the total variance in the output is due to force while 10.6% is due to subject related effects. Less that 0.2% of the variance is due to nonrepeatability.Subjects--Topical Terms:

3433833
Biomedical research.
Subjects--Index Terms:

sensors

Design, fabrication and testing of a flexible silicon tactile sensor.
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008 220723s1994 ||||||||||||||||| ||eng d
035 $a (MiAaPQ)AAI9431443
035 $a AAI9431443
040 $a MiAaPQ $c MiAaPQ
100 1 $a Beebe, David James. $3 3556861
245 1 0 $a Design, fabrication and testing of a flexible silicon tactile sensor.
260 1 $a Ann Arbor : $b ProQuest Dissertations & Theses, $c 1994
300 $a 225 p.
500 $a Source: Dissertations Abstracts International, Volume: 76-02, Section: B.
500 $a Publisher info.: Dissertation/Thesis.
500 $a Advisor: Denton, Denice D.
502 $a Thesis (Ph.D.)--The University of Wisconsin - Madison, 1994.
506 $a This item must not be sold to any third party vendors.
506 $a This item must not be added to any third party search indexes.
520 $a This paper describes the development of a silicon-based force sensor packaged in a flexible polyimide package. The fabrication process is compatible with standard integrated circuit processes and produces a flexible package which sandwiches the metal leads between protective polyimide layers. The durability of the package is tested on human subjects. Silicon direct bonding and bulk micromachining (both isotropic and anisotropic) are utilized to fabricate the silicon sensing element. The sensing element consists of a circular diaphragm (200 $\\mu$m thick with a 2 mm radius) over a 10 $\\mu$m sealed cavity. The shallow cavity depth provides built-in overload protection. The diaphragm is instrumented with piezoresistors in a Wheatstone bridge configuration. Sensitivity to force is realized via the addition of a solid dome over the silicon diaphragm. The dome acts to transmit the applied force to the diaphragm. Torlon and epoxy domes are bench tested. The epoxy dome produces significant hysteresis, while the Torlon dome shows low hysteresis (2.4% of the mean output) and low nonrepeatability ($<$2.8% of the mean output). The Torlon dome is subjected to a variety of loads to investigate the sensor's performance. In all cases, force accounts for at least 99.2% of the total variance in the output. Output sensitivities of 1.4 mV/V/N are typical. The response is linear for low forces ($<$10-N) and becomes curvilinear at higher forces when the diaphragm bottoms out. The corner point between the linear and curvilinear portion of the output response can be controlled via diaphragm radius, diaphragm thickness and cavity depth. Details of the microfabrication and micromachining processes are presented along with characterization of the force sensor system. The sensor is tested on five human subjects. For dynamic calibration trials, 85% of the total variance in the output is due to force while 10.6% is due to subject related effects. Less that 0.2% of the variance is due to nonrepeatability.
590 $a School code: 0262.
650 4 $a Biomedical research. $3 3433833
650 4 $a Electrical engineering. $3 649834
653 $a sensors
690 $a 0541
690 $a 0544
710 2 $a The University of Wisconsin - Madison. $3 626640
773 0 $t Dissertations Abstracts International $g 76-02B.
790 $a 0262
791 $a Ph.D.
792 $a 1994
793 $a English
856 4 0 $u https://pqdd.sinica.edu.tw/twdaoapp/servlet/advanced?query=9431443