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Optimization Driven Design and Opera...

Mak, Jason Chi Chun.

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Optimization Driven Design and Operation of Foundry Fabricated Silicon Photonics.

Record Type:	Electronic resources : Monograph/item
Title/Author:	Optimization Driven Design and Operation of Foundry Fabricated Silicon Photonics./
Author:	Mak, Jason Chi Chun.
Published:	Ann Arbor : ProQuest Dissertations & Theses, : 2019,
Description:	165 p.
Notes:	Source: Dissertations Abstracts International, Volume: 81-04, Section: B.
Contained By:	Dissertations Abstracts International81-04B.
Subject:	Electrical engineering. -
Online resource:	http://pqdd.sinica.edu.tw/twdaoapp/servlet/advanced?query=10979576
ISBN:	9781085758093

Optimization Driven Design and Operation of Foundry Fabricated Silicon Photonics.
Mak, Jason Chi Chun.

Optimization Driven Design and Operation of Foundry Fabricated Silicon Photonics. - Ann Arbor : ProQuest Dissertations & Theses, 2019 - 165 p.

Source: Dissertations Abstracts International, Volume: 81-04, Section: B.

Thesis (Ph.D.)--University of Toronto (Canada), 2019.

This item must not be sold to any third party vendors.

Motivated by growing capabilities to realize geometrically complex silicon (Si) devices and large scale photonic integrated circuits (PICs), this thesis explores the use of optimization algorithms for design and operation of Si photonics. Optimization procedures are implemented for designing and operating grating couplers, power splitters, and microring optical filters at telecommunication wavelengths. The devices reported in this thesis were fabricated in foundry Si photonics processes at A*STAR Institute of Microelectronics or CEA-Leti using deep ultra-violet lithography on 8" wafers.First, we present an optimization design procedure for bi-layer silicon nitride-on-silicon (SiN-on-Si) grating couplers (GCs). We designed the first SiN-on-Si GCs for the O-band in a new platform. Cross-wafer measurements showed a median peak coupling efficiency of -2.1 dB and a 1-dB bandwidth of 70.8 nm. We also present 3-layer SiN-SiN-Si one-dimensional polarization-independent grating couplers (PI-GCs) designed by optimization methods. The best-performing PI-GC had a peak coupling efficiency of -4.8 dB and a 1-dB polarization-dependent loss bandwidth of >100 nm, setting a record for PI-GCs. The higher than expected loss was likely due to fabrication imperfections in one of the SiN layers. Next, we report the first topology-optimized devices fabricated in a foundry process, a Si photonic 2x2 3-dB splitter within a 4.8 µm x 4.8 µm footprint. Despite not respecting design rules, the design with the smaller cells had lower insertion losses and broader bandwidth and showed consistent behavior across the wafer. However, results point towards the need to improve consistency between simulation the fabricated devices in future work. Finally, we demonstrate multi-variable tuning control that incorporates optimization algorithms to guide the tuning of multiple phase-shifters simultaneously. Multi-variable control becomes indispensable for PICs with a large (>> 10) number of constituent devices by reducing the number of electrical inputs/outputs and simplifying packaging. Repeatable resonance alignment and wavelength tracking in a 5-ring optical filter and a programmable 2-ring Butterworth filter are demonstrated. An application to switch matrix tuning is also explored. Taken together, this thesis showcases how optimization methods can open up new directions for advancing the field of foundry fabricated Si photonics.

ISBN: 9781085758093Subjects--Topical Terms:

649834
Electrical engineering.

Optimization Driven Design and Operation of Foundry Fabricated Silicon Photonics.
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520 $a Motivated by growing capabilities to realize geometrically complex silicon (Si) devices and large scale photonic integrated circuits (PICs), this thesis explores the use of optimization algorithms for design and operation of Si photonics. Optimization procedures are implemented for designing and operating grating couplers, power splitters, and microring optical filters at telecommunication wavelengths. The devices reported in this thesis were fabricated in foundry Si photonics processes at A*STAR Institute of Microelectronics or CEA-Leti using deep ultra-violet lithography on 8" wafers.First, we present an optimization design procedure for bi-layer silicon nitride-on-silicon (SiN-on-Si) grating couplers (GCs). We designed the first SiN-on-Si GCs for the O-band in a new platform. Cross-wafer measurements showed a median peak coupling efficiency of -2.1 dB and a 1-dB bandwidth of 70.8 nm. We also present 3-layer SiN-SiN-Si one-dimensional polarization-independent grating couplers (PI-GCs) designed by optimization methods. The best-performing PI-GC had a peak coupling efficiency of -4.8 dB and a 1-dB polarization-dependent loss bandwidth of >100 nm, setting a record for PI-GCs. The higher than expected loss was likely due to fabrication imperfections in one of the SiN layers. Next, we report the first topology-optimized devices fabricated in a foundry process, a Si photonic 2x2 3-dB splitter within a 4.8 µm x 4.8 µm footprint. Despite not respecting design rules, the design with the smaller cells had lower insertion losses and broader bandwidth and showed consistent behavior across the wafer. However, results point towards the need to improve consistency between simulation the fabricated devices in future work. Finally, we demonstrate multi-variable tuning control that incorporates optimization algorithms to guide the tuning of multiple phase-shifters simultaneously. Multi-variable control becomes indispensable for PICs with a large (>> 10) number of constituent devices by reducing the number of electrical inputs/outputs and simplifying packaging. Repeatable resonance alignment and wavelength tracking in a 5-ring optical filter and a programmable 2-ring Butterworth filter are demonstrated. An application to switch matrix tuning is also explored. Taken together, this thesis showcases how optimization methods can open up new directions for advancing the field of foundry fabricated Si photonics.
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