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Advances in chemical mechanical plan...

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Babu, S. V.,

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Advances in chemical mechanical planarization (CMP) /

Record Type:	Electronic resources : Monograph/item
Title/Author:	Advances in chemical mechanical planarization (CMP) // edited by Suryadevara Babu.
other author:	Babu, S. V.,
Published:	Waltham, MA :Woodhead Publishing, : 2016.,
Description:	1 online resource.
Subject:	Chemical mechanical planarization. -
Online resource:	http://www.sciencedirect.com/science/book/9780081001653
ISBN:	9780081001653

Advances in chemical mechanical planarization (CMP) /
Advances in chemical mechanical planarization (CMP) /edited by Suryadevara Babu. - Waltham, MA :Woodhead Publishing,2016. - 1 online resource. - Woodhead publishing series in electronic and optical materials ;number 86. - Woodhead Publishing series in electronic and optical materials ;number 86..

Includes bibliographical references and index.

ISBN: 9780081001653Subjects--Topical Terms:

3235220
Chemical mechanical planarization.
Index Terms--Genre/Form:

542853
Electronic books.

LC Class. No.: TK7874.84

Dewey Class. No.: 621.381

Advances in chemical mechanical planarization (CMP) /
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020 $a 9780081001653 $q (electronic bk.)
020 $a 9780081002186 $q (electronic bk.)
020 $a 0081002181 $q (electronic bk.)
035 $a (OCoLC)ocn934626626
035 $a els17001644
040 $a UIU $b eng $e rda $e pn $c UIU $d YDXCP $d UIU $d CDX $d OCLCF $d OPELS
041 0 $a eng
050 4 $a TK7874.84
082 0 4 $a 621.381 $2 23
245 0 0 $a Advances in chemical mechanical planarization (CMP) / $c edited by Suryadevara Babu.
260 1 $a Waltham, MA : $b Woodhead Publishing, $c 2016.
300 $a 1 online resource.
336 $a text $b txt $2 rdacontent
337 $a computer $b c $2 rdamedia
338 $a online resource $b cr $2 rdacarrier
490 1 $a Woodhead publishing series in electronic and optical materials ; $v number 86
504 $a Includes bibliographical references and index.
650 0 $a Chemical mechanical planarization. $3 3235220
650 0 $a Nanoelectronics. $3 898422
650 0 $a Microelectronics. $3 649832
655 4 $a Electronic books. $2 lcsh $3 542853
700 1 $a Babu, S. V., $e editor. $3 3235218
830 0 $a Woodhead Publishing series in electronic and optical materials ; $v number 86. $3 3235219
856 4 0 $u http://www.sciencedirect.com/science/book/9780081001653

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1 records • Pages 1 •
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W9319019

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11.線上閱覽_V

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EB TK7874.84

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