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MEMS-compatible processes for fabric...

He, Yuan.

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MEMS-compatible processes for fabricating nanostructures and their applications.

Record Type:	Electronic resources : Monograph/item
Title/Author:	MEMS-compatible processes for fabricating nanostructures and their applications./
Author:	He, Yuan.
Description:	125 p.
Notes:	Source: Dissertation Abstracts International, Volume: 77-03(E), Section: B.
Contained By:	Dissertation Abstracts International77-03B(E).
Subject:	Electrical engineering. -
Online resource:	http://pqdd.sinica.edu.tw/twdaoapp/servlet/advanced?query=3728809
ISBN:	9781339144108

MEMS-compatible processes for fabricating nanostructures and their applications.
He, Yuan.

MEMS-compatible processes for fabricating nanostructures and their applications. - 125 p.

Source: Dissertation Abstracts International, Volume: 77-03(E), Section: B.

Thesis (Ph.D.)--Iowa State University, 2015.

During the past decades, many different nanostructures have been successfully synthesized and developed. Due to their nanoscale dimensions, the nanostructures (i.e., nanostructured film, nanotubes, quantum dots) usually exhibit unique optical, electronic, or mechanical properties, which differ from those of the same bulk material. This dissertation focuses on the development and applications of two types of nanostructures: high aspect ratio (HAR) silicon nanostructures and anodic aluminum oxide (AAO) nanopores.

ISBN: 9781339144108Subjects--Topical Terms:

649834
Electrical engineering.

MEMS-compatible processes for fabricating nanostructures and their applications.
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100 1 $a He, Yuan. $3 3185948
245 1 0 $a MEMS-compatible processes for fabricating nanostructures and their applications.
300 $a 125 p.
500 $a Source: Dissertation Abstracts International, Volume: 77-03(E), Section: B.
500 $a Adviser: LONG QUE.
502 $a Thesis (Ph.D.)--Iowa State University, 2015.
520 $a During the past decades, many different nanostructures have been successfully synthesized and developed. Due to their nanoscale dimensions, the nanostructures (i.e., nanostructured film, nanotubes, quantum dots) usually exhibit unique optical, electronic, or mechanical properties, which differ from those of the same bulk material. This dissertation focuses on the development and applications of two types of nanostructures: high aspect ratio (HAR) silicon nanostructures and anodic aluminum oxide (AAO) nanopores.
520 $a (i) High aspect ratio (HAR) silicon nanostructures, including nanopillars, nanoforest and nanotubes, have attracted enormous attention in the fields of energy harvesting and storage, biomedical sensing, drug delivery, and template-based nanofabrication. Recently, several technologies, such as e-beam lithography and AAO template-based process, have been developed to synthesize HAR nanostructures such as silicon nanotubes. However, these technologies are expensive and usually complicated. In this effort, silicon nanopillars fabrication using nanospheres lithography (NSL) and nanoforest formation through a maskless Bosch process have been successfully developed. Nanomaterial grafted-nanopillar antireflection surface and a nanoforest-based SERS substrate have been demonstrated. Furthermore, a new simple process for fabricating silicon nanotubes at room temperature based on the Bosch process has been developed successfully, offering a unique platform for many potential exciting applications.
520 $a (ii) Among many different applications, anodic aluminum oxide (AAO) nanopores have been utilized as nanopore thin film interferometers for biochemical sensing. Using a two-step anodization process, AAO nanopores are usually fabricated from a piece of high purity Al foil. However, the process is not compatible with a standard lithography- based microfabrication process. As a result, it is very difficult to fabricate arrayed AAO nanopore-based optical microsensors in a cost- effective manner. To address these issues, a new process has been developed to fabricate micropatterned AAO nanopores thin film on glass slide using a standard lithography based microfabrication process. Also, the electron-beam evaporation coated Al thin films become optically transparent after anodization, making it possible to use the transmitted optical signals as the transducing signals. The arrayed AAO thin film-based interferometers have been integrated into a microfluidic chip and the detection of the binding between biomolecules has been demonstrated successfully.
590 $a School code: 0097.
650 4 $a Electrical engineering. $3 649834
690 $a 0544
710 2 $a Iowa State University. $b Electrical and Computer Engineering. $3 1018524
773 0 $t Dissertation Abstracts International $g 77-03B(E).
790 $a 0097
791 $a Ph.D.
792 $a 2015
793 $a English
856 4 0 $u http://pqdd.sinica.edu.tw/twdaoapp/servlet/advanced?query=3728809