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Helium Ion microscopy

Hlawacek, Gregor.

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Helium Ion microscopy

Record Type:	Electronic resources : Monograph/item
Title/Author:	Helium Ion microscopy/ edited by Gregor Hlawacek, Armin Golzhauser.
other author:	Hlawacek, Gregor.
Published:	Cham :Springer International Publishing : : 2016.,
Description:	xxiii, 526 p. :ill. (some col.), digital ;24 cm.
Contained By:	Springer eBooks
Subject:	Field ion microscopy. -
Online resource:	http://dx.doi.org/10.1007/978-3-319-41990-9
ISBN:	9783319419909

Helium Ion microscopy
Helium Ion microscopy[electronic resource] /edited by Gregor Hlawacek, Armin Golzhauser. - Cham :Springer International Publishing :2016. - xxiii, 526 p. :ill. (some col.), digital ;24 cm. - NanoScience and technology,1434-4904. - NanoScience and technology..

This book covers the fundamentals of Helium Ion Microscopy (HIM) including the Gas Field Ion Source (GFIS), column and contrast formation. It also provides first hand information on nanofabrication and high resolution imaging. Relevant theoretical models and the existing simulation approaches are discussed in an extra section. The structure of the book allows the novice to get acquainted with the specifics of the technique needed to understand the more applied chapters in the second half of the volume. The expert reader will find a complete reference of the technique covering all important applications in several chapters written by the leading experts in the field. This includes imaging of biological samples, resist and precursor based nanofabrication, applications in semiconductor industry, using Helium as well as Neon and many more. The fundamental part allows the regular HIM user to deepen his understanding of the method. A final chapter by Bill Ward, one of the pioneers of HIM, covering the historical developments leading to the existing tool complements the content.

ISBN: 9783319419909

Standard No.: 10.1007/978-3-319-41990-9doiSubjects--Topical Terms:

674118
Field ion microscopy.

LC Class. No.: QH212.F5

Dewey Class. No.: 578.1

Helium Ion microscopy
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245 0 0 $a Helium Ion microscopy $h [electronic resource] / $c edited by Gregor Hlawacek, Armin Golzhauser.
260 $a Cham : $b Springer International Publishing : $b Imprint: Springer, $c 2016.
300 $a xxiii, 526 p. : $b ill. (some col.), digital ; $c 24 cm.
490 1 $a NanoScience and technology, $x 1434-4904
520 $a This book covers the fundamentals of Helium Ion Microscopy (HIM) including the Gas Field Ion Source (GFIS), column and contrast formation. It also provides first hand information on nanofabrication and high resolution imaging. Relevant theoretical models and the existing simulation approaches are discussed in an extra section. The structure of the book allows the novice to get acquainted with the specifics of the technique needed to understand the more applied chapters in the second half of the volume. The expert reader will find a complete reference of the technique covering all important applications in several chapters written by the leading experts in the field. This includes imaging of biological samples, resist and precursor based nanofabrication, applications in semiconductor industry, using Helium as well as Neon and many more. The fundamental part allows the regular HIM user to deepen his understanding of the method. A final chapter by Bill Ward, one of the pioneers of HIM, covering the historical developments leading to the existing tool complements the content.
650 0 $a Field ion microscopy. $3 674118
650 0 $a Helium ions. $3 3166372
650 0 $a Ion bombardment. $3 697753
650 1 4 $a Physics. $3 516296
650 2 4 $a Spectroscopy and Microscopy. $3 1066375
650 2 4 $a Surfaces and Interfaces, Thin Films. $3 892408
650 2 4 $a Surface and Interface Science, Thin Films. $3 1244633
650 2 4 $a Nanotechnology and Microengineering. $3 1005737
700 1 $a Hlawacek, Gregor. $3 3166370
700 1 $a Golzhauser, Armin. $3 3166371
710 2 $a SpringerLink (Online service) $3 836513
773 0 $t Springer eBooks
830 0 $a NanoScience and technology. $3 1567468
856 4 0 $u http://dx.doi.org/10.1007/978-3-319-41990-9
950 $a Chemistry and Materials Science (Springer-11644)