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Resonant MEMS = fundamentals, implem...

Brand, Oliver.

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Resonant MEMS = fundamentals, implementation and application /

Record Type:	Electronic resources : Monograph/item
Title/Author:	Resonant MEMS/ edited by Oliver Brand ... [et al.].
Reminder of title:	fundamentals, implementation and application /
other author:	Brand, Oliver.
Published:	Wiesbaden :John Wiley and Sons, : c2015.,
Description:	1 online resource :ill.
Subject:	Microelectromechanical systems - Design and construction. -
Online resource:	http://onlinelibrary.wiley.com/book/10.1002/9783527676330
ISBN:	9783527676330 (electronic bk.)

Resonant MEMS = fundamentals, implementation and application /
Resonant MEMSfundamentals, implementation and application /[electronic resource] :edited by Oliver Brand ... [et al.]. - 1st ed. - Wiesbaden :John Wiley and Sons,c2015. - 1 online resource :ill. - Advanced micro and nanosystems. - Advanced micro & nanosystems..

Includes bibliographical references and index.

ISBN: 9783527676330 (electronic bk.)Subjects--Topical Terms:

753820
Microelectromechanical systems
--Design and construction.

LC Class. No.: TK7875

Dewey Class. No.: 621.381

Resonant MEMS = fundamentals, implementation and application /
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245 0 0 $a Resonant MEMS $h [electronic resource] : $b fundamentals, implementation and application / $c edited by Oliver Brand ... [et al.].
250 $a 1st ed.
260 $a Wiesbaden : $b John Wiley and Sons, $c c2015.
300 $a 1 online resource : $b ill.
490 1 $a Advanced micro and nanosystems
504 $a Includes bibliographical references and index.
588 0 $a Online resource; title from PDF title page (Ebsco, viewed May 11, 2015)
588 $a Description based on print version record.
650 0 $a Microelectromechanical systems $x Design and construction. $3 753820
650 0 $a Microfabrication. $3 743509
650 0 $a Resonance. $3 2047756
700 1 $a Brand, Oliver. $3 894240
830 0 $a Advanced micro & nanosystems. $3 2147855
856 4 0 $u http://onlinelibrary.wiley.com/book/10.1002/9783527676330