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Nanopositioning technologies = funda...

Ru, Changhai.

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Nanopositioning technologies = fundamentals and applications /

Record Type:	Electronic resources : Monograph/item
Title/Author:	Nanopositioning technologies/ edited by Changhai Ru, Xinyu Liu, Yu Sun.
Reminder of title:	fundamentals and applications /
other author:	Ru, Changhai.
Published:	Cham :Springer International Publishing : : 2016.,
Description:	vi, 409 p. :ill., digital ;24 cm.
[NT 15003449]:	1.A review of Stick-Slip Nanopositioning Actuators -- 2. Piezoelectric Motor Technology - A Review -- 3.Design of High-speed Nanopositioning Systems -- 4.Parallel-Kinematic Nanopositioning Stages Based on Roberts Mechanism -- 5.Electro-magnetic Nano Positioning -- 6.Modeling of piezoelectric-actuated nanopositioning stages involving with the hysteresis -- 7. Tracking Control for Nanopositioning -- 8.Position Sensors for Nanopositioning -- 9. MEMS Nanopositioners -- 10.Control Issues of MEMS nanopositioning devices -- 11. A Review of Nanomanipulation in Scanning Electron Microscopes -- 12. Nanopositioning for lithography and data storage.
Contained By:	Springer eBooks
Subject:	Nanoelectromechanical systems. -
Online resource:	http://dx.doi.org/10.1007/978-3-319-23853-1
ISBN:	9783319238531$q(electronic bk.)

Nanopositioning technologies = fundamentals and applications /
Nanopositioning technologiesfundamentals and applications /[electronic resource] :edited by Changhai Ru, Xinyu Liu, Yu Sun. - Cham :Springer International Publishing :2016. - vi, 409 p. :ill., digital ;24 cm.

1.A review of Stick-Slip Nanopositioning Actuators -- 2. Piezoelectric Motor Technology - A Review -- 3.Design of High-speed Nanopositioning Systems -- 4.Parallel-Kinematic Nanopositioning Stages Based on Roberts Mechanism -- 5.Electro-magnetic Nano Positioning -- 6.Modeling of piezoelectric-actuated nanopositioning stages involving with the hysteresis -- 7. Tracking Control for Nanopositioning -- 8.Position Sensors for Nanopositioning -- 9. MEMS Nanopositioners -- 10.Control Issues of MEMS nanopositioning devices -- 11. A Review of Nanomanipulation in Scanning Electron Microscopes -- 12. Nanopositioning for lithography and data storage.

This book covers the state-of-the-art technologies for positioning with nanometer resolutions and accuracies, particularly those based on piezoelectric actuators and MEMS actuators. The latest advances are described, including the design of nanopositioning devices, sensing and actuation technologies, and control methods for nanopositioning. This is an ideal book for mechanical and electrical engineering students and researchers; micro and nanotechnology researchers and graduate students; as well as those working in the precision instrumentation or semiconductor industries.

ISBN: 9783319238531$q(electronic bk.)

Standard No.: 10.1007/978-3-319-23853-1doiSubjects--Topical Terms:

942280
Nanoelectromechanical systems.

LC Class. No.: TK7875

Dewey Class. No.: 620.5

Nanopositioning technologies = fundamentals and applications /
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245 0 0 $a Nanopositioning technologies $h [electronic resource] : $b fundamentals and applications / $c edited by Changhai Ru, Xinyu Liu, Yu Sun.
260 $a Cham : $b Springer International Publishing : $b Imprint: Springer, $c 2016.
300 $a vi, 409 p. : $b ill., digital ; $c 24 cm.
505 0 $a 1.A review of Stick-Slip Nanopositioning Actuators -- 2. Piezoelectric Motor Technology - A Review -- 3.Design of High-speed Nanopositioning Systems -- 4.Parallel-Kinematic Nanopositioning Stages Based on Roberts Mechanism -- 5.Electro-magnetic Nano Positioning -- 6.Modeling of piezoelectric-actuated nanopositioning stages involving with the hysteresis -- 7. Tracking Control for Nanopositioning -- 8.Position Sensors for Nanopositioning -- 9. MEMS Nanopositioners -- 10.Control Issues of MEMS nanopositioning devices -- 11. A Review of Nanomanipulation in Scanning Electron Microscopes -- 12. Nanopositioning for lithography and data storage.
520 $a This book covers the state-of-the-art technologies for positioning with nanometer resolutions and accuracies, particularly those based on piezoelectric actuators and MEMS actuators. The latest advances are described, including the design of nanopositioning devices, sensing and actuation technologies, and control methods for nanopositioning. This is an ideal book for mechanical and electrical engineering students and researchers; micro and nanotechnology researchers and graduate students; as well as those working in the precision instrumentation or semiconductor industries.
650 0 $a Nanoelectromechanical systems. $3 942280
650 1 4 $a Engineering. $3 586835
650 2 4 $a Nanotechnology and Microengineering. $3 1005737
650 2 4 $a Electronics and Microelectronics, Instrumentation. $3 893838
650 2 4 $a Control, Robotics, Mechatronics. $3 1002220
650 2 4 $a Engineering Design. $3 891033
700 1 $a Ru, Changhai. $3 2181184
700 1 $a Liu, Xinyu. $3 1920374
700 1 $a Sun, Yu. $3 1018127
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773 0 $t Springer eBooks
856 4 0 $u http://dx.doi.org/10.1007/978-3-319-23853-1
950 $a Engineering (Springer-11647)