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Micro and nano fabrication = tools a...

Gatzen, Hans H.

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Micro and nano fabrication = tools and processes /

Record Type:	Electronic resources : Monograph/item
Title/Author:	Micro and nano fabrication/ by Hans H. Gatzen, Volker Saile, Jurg Leuthold.
Reminder of title:	tools and processes /
Author:	Gatzen, Hans H.
other author:	Saile, Volker.
Published:	Berlin, Heidelberg :Springer Berlin Heidelberg : : 2015.,
Description:	xxvi, 519 p. :ill., digital ;24 cm.
[NT 15003449]:	Introduction-MEMS, a Historical Perspective -- Vacuum Technology -- Deposition Technologies -- Etching Technologies -- Doping and Surface Modification -- Lithography -- LIGA -- Nanofabrication by Self-Assembly -- Enabling Technologies I - Wafer Planarization and Bonding -- Enabling Technologies II - Contamination Control -- Device Fabrication - An Example.
Contained By:	Springer eBooks
Subject:	Microelectromechanical systems. -
Online resource:	http://dx.doi.org/10.1007/978-3-662-44395-8
ISBN:	9783662443958 (electronic bk.)

Micro and nano fabrication = tools and processes /
Gatzen, Hans H.

Micro and nano fabricationtools and processes /[electronic resource] :by Hans H. Gatzen, Volker Saile, Jurg Leuthold. - Berlin, Heidelberg :Springer Berlin Heidelberg :2015. - xxvi, 519 p. :ill., digital ;24 cm.

Introduction-MEMS, a Historical Perspective -- Vacuum Technology -- Deposition Technologies -- Etching Technologies -- Doping and Surface Modification -- Lithography -- LIGA -- Nanofabrication by Self-Assembly -- Enabling Technologies I - Wafer Planarization and Bonding -- Enabling Technologies II - Contamination Control -- Device Fabrication - An Example.

For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process technologies applied. Besides, it describes enabling technologies which are necessary for a successful production, i.e., wafer planarization and bonding, as well as contamination control.

ISBN: 9783662443958 (electronic bk.)

Standard No.: 10.1007/978-3-662-44395-8doiSubjects--Topical Terms:

567138
Microelectromechanical systems.

LC Class. No.: TK7875

Dewey Class. No.: 620.5

Micro and nano fabrication = tools and processes /
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020 $a 9783662443958 (electronic bk.)
020 $a 9783662443941 (paper)
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100 1 $a Gatzen, Hans H. $3 2134104
245 1 0 $a Micro and nano fabrication $h [electronic resource] : $b tools and processes / $c by Hans H. Gatzen, Volker Saile, Jurg Leuthold.
260 $a Berlin, Heidelberg : $b Springer Berlin Heidelberg : $b Imprint: Springer, $c 2015.
300 $a xxvi, 519 p. : $b ill., digital ; $c 24 cm.
505 0 $a Introduction-MEMS, a Historical Perspective -- Vacuum Technology -- Deposition Technologies -- Etching Technologies -- Doping and Surface Modification -- Lithography -- LIGA -- Nanofabrication by Self-Assembly -- Enabling Technologies I - Wafer Planarization and Bonding -- Enabling Technologies II - Contamination Control -- Device Fabrication - An Example.
520 $a For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process technologies applied. Besides, it describes enabling technologies which are necessary for a successful production, i.e., wafer planarization and bonding, as well as contamination control.
650 0 $a Microelectromechanical systems. $3 567138
650 1 4 $a Engineering. $3 586835
650 2 4 $a Nanotechnology and Microengineering. $3 1005737
650 2 4 $a Manufacturing, Machines, Tools. $3 891025
650 2 4 $a Operating Procedures, Materials Treatment. $3 898832
700 1 $a Saile, Volker. $3 2134105
700 1 $a Leuthold, Jurg. $3 2134106
710 2 $a SpringerLink (Online service) $3 836513
773 0 $t Springer eBooks
856 4 0 $u http://dx.doi.org/10.1007/978-3-662-44395-8
950 $a Engineering (Springer-11647)