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Trace analysis of specialty and elec...

Geiger, William M., (1948-)

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Trace analysis of specialty and electronic gases

Record Type:	Electronic resources : Monograph/item
Title/Author:	Trace analysis of specialty and electronic gases/ edited by William M. Geiger, Mark W. Raynor.
Author:	Geiger, William M.,
other author:	Raynor, Mark W.,
Published:	Hoboken :Wiley, : c2013.,
Description:	1 online resource (xxxv, 349 p.) :ill.
Notes:	Appendix A: Cylinder and Specialized Fittings.
[NT 15003449]:	Cover; Half Title page; Title page; Copyright page; Contributors; List of Figures; List of Tables; Foreword; Acknowledgments; Acronyms; Chapter 1: Introduction to Gas Analysis: Past and Future; 1.1 The Beginning; 1.2 Gas Chromatography; 1.3 Ion Chromatography; 1.4 Mass Spectrometry; 1.5 Ion Mobility Spectrometry; 1.6 Optical Spectroscopy; 1.7 Metals Analysis; 1.8 Species-Specific Analyzers; 1.9 Sensors; 1.10 The Future; References; Chapter 2: Sample Preparation and ICP-MS Analysis of Gases for Metals; 2.1 Introduction; 2.2 Extraction of Impurities Before Analysis; 2.3 Direct Analysis of ESGs.
[NT 15003449]:	2.4 ConclusionsReferences; Chapter 3: Novel Improvements in FTIR Analysis of Specialty Gases; 3.1 Gas-Phase Analysis Using FTIR Spectroscopy; 3.2 Gas-Phase Effects on Spectral Line Shape; 3.3 Factors That Greatly Affect Quantification; 3.4 Future Applications; References; Chapter 4: Emerging Infrared Laser Absorption Spectroscopic Techniques for Gas Analysis; 4.1 Introduction; 4.2 Laser Absorption Spectroscopic Techniques; 4.3 Applications of Semiconductor LAS-Based Trace Gas Sensor Systems; 4.4 Conclusions and Future Trends; References.
[NT 15003449]:	Chapter 5: Atmospheric Pressure Ionization Mass Spectrometry for Bulk and Electronic Gas Analysis5.1 Introduction; 5.2 APIMS Operating Principle; 5.3 Point-to-Plane Corona Discharge Ionization; 5.4 Factors Affecting Sensitivity in Point-to-Plane Corona Discharge APIMS; 5.5 Applications of Point-to-Plane Corona Discharge APIMS in Bulk and Electronic Gases; 5.6 Nickel-63 Beta Emitter APIMS; 5.7 Specialty Gas Analysis Application: Determination of Oxygenated Impurities in High-Purity Ammonia; 5.8 Conclusions; References.
[NT 15003449]:	Chapter 6: GC/MS, GC/AED, and GC-ICP-MS Analysis of Electronic Specialty Gases6.1 Introduction; 6.2 GC/MS; 6.3 GC/AED; 6.4 GC-ICP-MS; 6.5 Conclusions; References; Chapter 7: Trace Water Vapor Analysis in Specialty Gases: Sensor and Spectroscopic Approaches; 7.1 Introduction; 7.2 Primary Standards for Water Vapor Measurement; 7.3 Sensor Technologies; 7.4 Spectroscopic Methods; 7.5 Conclusions; References; Chapter 8: Gas Chromatographic Column Considerations; 8.1 Introduction; 8.2 Column Considerations with Packed Columns; 8.3 Primary Selection Criteria for Capillary Columns; 8.4 Applications.
[NT 15003449]:	8.5 The Future8.6 Conclusions; References; Chapter 9: Gas Mixtures and Standards; 9.1 Introduction; 9.2 Definition of Gas Standards; 9.3 Cylinders and Valves: Sizes, Types, and Material Compositions; 9.4 Preparation Techniques for Gas Standards; 9.5 Pressure Restrictions and Compressibility Considerations; 9.6 Multicomponent Standards: General Considerations; 9.7 Cylinder Standard Stability Consideration; 9.8 Liquefied Compressed Gas Standards: Preparation Differences and Uses; 9.9 Cylinder Standard Alternatives; 9.10 Dilution Devices and Calibration Uses; References.
Subject:	Gases - Analysis. -
Online resource:	http://onlinelibrary.wiley.com/book/10.1002/9781118642771
ISBN:	9781118642771 (electronic bk.)

Trace analysis of specialty and electronic gases
Geiger, William M.,1948-

Trace analysis of specialty and electronic gases[electronic resource] /edited by William M. Geiger, Mark W. Raynor. - Hoboken :Wiley,c2013. - 1 online resource (xxxv, 349 p.) :ill.

Appendix A: Cylinder and Specialized Fittings.

Includes bibliographical references and index.

Cover; Half Title page; Title page; Copyright page; Contributors; List of Figures; List of Tables; Foreword; Acknowledgments; Acronyms; Chapter 1: Introduction to Gas Analysis: Past and Future; 1.1 The Beginning; 1.2 Gas Chromatography; 1.3 Ion Chromatography; 1.4 Mass Spectrometry; 1.5 Ion Mobility Spectrometry; 1.6 Optical Spectroscopy; 1.7 Metals Analysis; 1.8 Species-Specific Analyzers; 1.9 Sensors; 1.10 The Future; References; Chapter 2: Sample Preparation and ICP-MS Analysis of Gases for Metals; 2.1 Introduction; 2.2 Extraction of Impurities Before Analysis; 2.3 Direct Analysis of ESGs.

Explores the latest advances and applications of specialty and electronic gas analysis The semiconductor industry depends upon a broad range of instrumental techniques in order to detect and analyze impurities that may be present in specialty and electronic gases, including permanent gases, water vapor, reaction by-products, and metal species. Trace Analysis of Specialty and Electronic Gases draws together all the latest advances in analytical chemistry, providing researchers with both the theory and the operating principles of the full spectrum of instrumental technique.

ISBN: 9781118642771 (electronic bk.)Subjects--Topical Terms:

603860
Gases
--Analysis.

LC Class. No.: QD121

Dewey Class. No.: 543

Trace analysis of specialty and electronic gases
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050 4 $a QD121
082 0 4 $a 543
100 1 $a Geiger, William M., $d 1948- $3 2084610
245 1 0 $a Trace analysis of specialty and electronic gases $h [electronic resource] / $c edited by William M. Geiger, Mark W. Raynor.
260 $a Hoboken : $b Wiley, $c c2013.
300 $a 1 online resource (xxxv, 349 p.) : $b ill.
500 $a Appendix A: Cylinder and Specialized Fittings.
504 $a Includes bibliographical references and index.
505 0 $a Cover; Half Title page; Title page; Copyright page; Contributors; List of Figures; List of Tables; Foreword; Acknowledgments; Acronyms; Chapter 1: Introduction to Gas Analysis: Past and Future; 1.1 The Beginning; 1.2 Gas Chromatography; 1.3 Ion Chromatography; 1.4 Mass Spectrometry; 1.5 Ion Mobility Spectrometry; 1.6 Optical Spectroscopy; 1.7 Metals Analysis; 1.8 Species-Specific Analyzers; 1.9 Sensors; 1.10 The Future; References; Chapter 2: Sample Preparation and ICP-MS Analysis of Gases for Metals; 2.1 Introduction; 2.2 Extraction of Impurities Before Analysis; 2.3 Direct Analysis of ESGs.
505 8 $a 2.4 ConclusionsReferences; Chapter 3: Novel Improvements in FTIR Analysis of Specialty Gases; 3.1 Gas-Phase Analysis Using FTIR Spectroscopy; 3.2 Gas-Phase Effects on Spectral Line Shape; 3.3 Factors That Greatly Affect Quantification; 3.4 Future Applications; References; Chapter 4: Emerging Infrared Laser Absorption Spectroscopic Techniques for Gas Analysis; 4.1 Introduction; 4.2 Laser Absorption Spectroscopic Techniques; 4.3 Applications of Semiconductor LAS-Based Trace Gas Sensor Systems; 4.4 Conclusions and Future Trends; References.
505 8 $a Chapter 5: Atmospheric Pressure Ionization Mass Spectrometry for Bulk and Electronic Gas Analysis5.1 Introduction; 5.2 APIMS Operating Principle; 5.3 Point-to-Plane Corona Discharge Ionization; 5.4 Factors Affecting Sensitivity in Point-to-Plane Corona Discharge APIMS; 5.5 Applications of Point-to-Plane Corona Discharge APIMS in Bulk and Electronic Gases; 5.6 Nickel-63 Beta Emitter APIMS; 5.7 Specialty Gas Analysis Application: Determination of Oxygenated Impurities in High-Purity Ammonia; 5.8 Conclusions; References.
505 8 $a Chapter 6: GC/MS, GC/AED, and GC-ICP-MS Analysis of Electronic Specialty Gases6.1 Introduction; 6.2 GC/MS; 6.3 GC/AED; 6.4 GC-ICP-MS; 6.5 Conclusions; References; Chapter 7: Trace Water Vapor Analysis in Specialty Gases: Sensor and Spectroscopic Approaches; 7.1 Introduction; 7.2 Primary Standards for Water Vapor Measurement; 7.3 Sensor Technologies; 7.4 Spectroscopic Methods; 7.5 Conclusions; References; Chapter 8: Gas Chromatographic Column Considerations; 8.1 Introduction; 8.2 Column Considerations with Packed Columns; 8.3 Primary Selection Criteria for Capillary Columns; 8.4 Applications.
505 8 $a 8.5 The Future8.6 Conclusions; References; Chapter 9: Gas Mixtures and Standards; 9.1 Introduction; 9.2 Definition of Gas Standards; 9.3 Cylinders and Valves: Sizes, Types, and Material Compositions; 9.4 Preparation Techniques for Gas Standards; 9.5 Pressure Restrictions and Compressibility Considerations; 9.6 Multicomponent Standards: General Considerations; 9.7 Cylinder Standard Stability Consideration; 9.8 Liquefied Compressed Gas Standards: Preparation Differences and Uses; 9.9 Cylinder Standard Alternatives; 9.10 Dilution Devices and Calibration Uses; References.
520 $a Explores the latest advances and applications of specialty and electronic gas analysis The semiconductor industry depends upon a broad range of instrumental techniques in order to detect and analyze impurities that may be present in specialty and electronic gases, including permanent gases, water vapor, reaction by-products, and metal species. Trace Analysis of Specialty and Electronic Gases draws together all the latest advances in analytical chemistry, providing researchers with both the theory and the operating principles of the full spectrum of instrumental technique.
588 $a Description based on print version record.
650 0 $a Gases $x Analysis. $3 603860
650 0 $a Trace elements $x Analysis. $3 661615
650 0 $a Gases $x Spectra. $3 1565861
700 1 $a Raynor, Mark W., $d 1961- $3 2084611
856 4 0 $u http://onlinelibrary.wiley.com/book/10.1002/9781118642771