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Sputtering materials for VLSI and th...

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Sarkar, Jaydeep, ((Materials scientist))

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Sputtering materials for VLSI and thin film devices

Record Type:	Electronic resources : Monograph/item
Title/Author:	Sputtering materials for VLSI and thin film devices/ by Jaydeep Sarkar.
Author:	Sarkar, Jaydeep,
Published:	Norwich, N.Y. :William Andrew ; : 2011.,
Description:	x, 603 p. :ill. ;25 cm.
Subject:	Sputtering (Physics) -
Online resource:	http://www.sciencedirect.com/science/book/9780815515937
ISBN:	9780815515937 (electronic bk.)

Sputtering materials for VLSI and thin film devices
Sarkar, Jaydeep,(Materials scientist)

Sputtering materials for VLSI and thin film devices[electronic resource] /by Jaydeep Sarkar. - Norwich, N.Y. :William Andrew ;2011. - x, 603 p. :ill. ;25 cm.

Includes bibliographical references and index.

ISBN: 9780815515937 (electronic bk.)Subjects--Topical Terms:

697333
Sputtering (Physics)

LC Class. No.: TK7874 / .S273 2014

Dewey Class. No.: 621.381

Sputtering materials for VLSI and thin film devices
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005 20140702153826.0
008 150102s2011 nyua sb 001 0 eng d
020 $a 9780815515937 (electronic bk.)
020 $a 9780815515937
035 $a (OCoLC)660539201 $z (OCoLC)316833348
035 $a 14000498
040 $a UKM $b eng $c UKM $d BTCTA $d YDXCP
041 0 $a eng
050 4 $a TK7874 $b .S273 2014
082 0 4 $a 621.381 $2 22
100 1 $a Sarkar, Jaydeep, $c (Materials scientist) $3 2046182
245 1 0 $a Sputtering materials for VLSI and thin film devices $h [electronic resource] / $c by Jaydeep Sarkar.
260 $a Norwich, N.Y. : $b William Andrew ; $a Oxford : $b Elsevier Science [distributor], $c 2011.
300 $a x, 603 p. : $b ill. ; $c 25 cm.
504 $a Includes bibliographical references and index.
650 0 $a Sputtering (Physics) $3 697333
650 0 $a Microelectronics $x Materials. $3 656983
650 0 $a Flat panel displays $x Materials. $3 2046183
856 4 0 $u http://www.sciencedirect.com/science/book/9780815515937

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W9246004

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EB TK7874 .S273 2014

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