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Atomic layer deposition for semicond...
~
Seong Hwang, Cheol.
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Atomic layer deposition for semiconductors
Record Type:
Electronic resources : Monograph/item
Title/Author:
Atomic layer deposition for semiconductors/ edited by Cheol Seong Hwang.
other author:
Seong Hwang, Cheol.
Published:
Boston, MA :Springer US : : 2014.,
Description:
x, 263 p. :ill., digital ;24 cm.
Contained By:
Springer eBooks
Subject:
Semiconductors - Surfaces. -
Online resource:
http://dx.doi.org/10.1007/978-1-4614-8054-9
ISBN:
9781461480549 (electronic bk.)
Atomic layer deposition for semiconductors
Atomic layer deposition for semiconductors
[electronic resource] /edited by Cheol Seong Hwang. - Boston, MA :Springer US :2014. - x, 263 p. :ill., digital ;24 cm.
ISBN: 9781461480549 (electronic bk.)Subjects--Topical Terms:
710167
Semiconductors
--Surfaces.
Dewey Class. No.: 621.38152
Atomic layer deposition for semiconductors
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[electronic resource] /
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edited by Cheol Seong Hwang.
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Springer US :
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Imprint: Springer,
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2014.
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x, 263 p. :
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ill., digital ;
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24 cm.
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Semiconductors
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Chemistry.
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Electrochemistry.
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Semiconductors.
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Electronics and Microelectronics, Instrumentation.
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Seong Hwang, Cheol.
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http://dx.doi.org/10.1007/978-1-4614-8054-9
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Chemistry and Materials Science (Springer-11644)
based on 0 review(s)
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Volume Number:
Items
1 records • Pages 1 •
1
Inventory Number
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Material type
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Usage Class
Loan Status
No. of reservations
Opac note
Attachments
W9241378
電子資源
11.線上閱覽_V
電子書
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1 records • Pages 1 •
1
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