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MEMS and nanotechnology. = proceedin...

Shaw III, Gordon.

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MEMS and nanotechnology. = proceedings of the 2013 Annual Conference on Experimental and Applied Mechanics. Volume 5 :

紀錄類型:	書目-電子資源 : Monograph/item
正題名/作者:	MEMS and nanotechnology./ edited by Gordon Shaw III ... [et al.].
其他題名:	proceedings of the 2013 Annual Conference on Experimental and Applied Mechanics
其他作者:	Shaw III, Gordon.
出版者:	Cham :Springer International Publishing : : 2014.,
面頁冊數:	viii, 134 p. :ill., digital ;24 cm.
Contained By:	Springer eBooks
標題:	Microelectromechanical systems -
電子資源:	http://dx.doi.org/10.1007/978-3-319-00780-9
ISBN:	9783319007809 (electronic bk.)

MEMS and nanotechnology. = proceedings of the 2013 Annual Conference on Experimental and Applied Mechanics. Volume 5 :
MEMS and nanotechnology.proceedings of the 2013 Annual Conference on Experimental and Applied MechanicsVolume 5 :[electronic resource] /edited by Gordon Shaw III ... [et al.]. - Cham :Springer International Publishing :2014. - viii, 134 p. :ill., digital ;24 cm. - Conference proceedings of the Society for Experimental Mechanics series,2191-5644. - Conference proceedings of the Society for Experimental Mechanics series..

ISBN: 9783319007809 (electronic bk.)Subjects--Topical Terms:

731713
Microelectromechanical systems

Dewey Class. No.: 621.381

MEMS and nanotechnology. = proceedings of the 2013 Annual Conference on Experimental and Applied Mechanics. Volume 5 :
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