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MEMS and nanotechnology. = proceedin...

Shaw III, Gordon.

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MEMS and nanotechnology. = proceedings of the 2013 Annual Conference on Experimental and Applied Mechanics. Volume 5 :

Record Type:	Electronic resources : Monograph/item
Title/Author:	MEMS and nanotechnology./ edited by Gordon Shaw III ... [et al.].
Reminder of title:	proceedings of the 2013 Annual Conference on Experimental and Applied Mechanics
other author:	Shaw III, Gordon.
Published:	Cham :Springer International Publishing : : 2014.,
Description:	viii, 134 p. :ill., digital ;24 cm.
Contained By:	Springer eBooks
Subject:	Microelectromechanical systems -
Online resource:	http://dx.doi.org/10.1007/978-3-319-00780-9
ISBN:	9783319007809 (electronic bk.)

MEMS and nanotechnology. = proceedings of the 2013 Annual Conference on Experimental and Applied Mechanics. Volume 5 :
MEMS and nanotechnology.proceedings of the 2013 Annual Conference on Experimental and Applied MechanicsVolume 5 :[electronic resource] /edited by Gordon Shaw III ... [et al.]. - Cham :Springer International Publishing :2014. - viii, 134 p. :ill., digital ;24 cm. - Conference proceedings of the Society for Experimental Mechanics series,2191-5644. - Conference proceedings of the Society for Experimental Mechanics series..

ISBN: 9783319007809 (electronic bk.)Subjects--Topical Terms:

731713
Microelectromechanical systems

Dewey Class. No.: 621.381

MEMS and nanotechnology. = proceedings of the 2013 Annual Conference on Experimental and Applied Mechanics. Volume 5 :
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245 1 0 $a MEMS and nanotechnology. $n Volume 5 : $b proceedings of the 2013 Annual Conference on Experimental and Applied Mechanics $h [electronic resource] / $c edited by Gordon Shaw III ... [et al.].
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490 1 $a Conference proceedings of the Society for Experimental Mechanics series, $x 2191-5644
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