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Poly-SiGe for MEMS-above-CMOS sensors

Gonzalez Ruiz, Pilar.

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Poly-SiGe for MEMS-above-CMOS sensors

Record Type:	Electronic resources : Monograph/item
Title/Author:	Poly-SiGe for MEMS-above-CMOS sensors/ by Pilar Gonzalez Ruiz, Kristin De Meyer, Ann Witvrouw.
Author:	Gonzalez Ruiz, Pilar.
other author:	De Meyer, Kristin.
Published:	Dordrecht :Springer Netherlands : : 2014.,
Description:	xvi, 199 p. :ill., digital ;24 cm.
Contained By:	Springer eBooks
Subject:	Microelectromechanical systems. -
Online resource:	http://dx.doi.org/10.1007/978-94-007-6799-7
ISBN:	9789400767997 (electronic bk.)

Poly-SiGe for MEMS-above-CMOS sensors
Gonzalez Ruiz, Pilar.

Poly-SiGe for MEMS-above-CMOS sensors[electronic resource] /by Pilar Gonzalez Ruiz, Kristin De Meyer, Ann Witvrouw. - Dordrecht :Springer Netherlands :2014. - xvi, 199 p. :ill., digital ;24 cm. - Springer series in advanced microelectronics,v.441437-0387 ;. - Springer series in advanced microelectronics ;33..

ISBN: 9789400767997 (electronic bk.)Subjects--Topical Terms:

567138
Microelectromechanical systems.

LC Class. No.: TK7875 / .G66 2014

Dewey Class. No.: 621.381

Poly-SiGe for MEMS-above-CMOS sensors
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050 4 $a TK7875 $b .G66 2014
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100 1 $a Gonzalez Ruiz, Pilar. $3 2054428
245 1 0 $a Poly-SiGe for MEMS-above-CMOS sensors $h [electronic resource] / $c by Pilar Gonzalez Ruiz, Kristin De Meyer, Ann Witvrouw.
260 $a Dordrecht : $b Springer Netherlands : $b Imprint: Springer, $c 2014.
300 $a xvi, 199 p. : $b ill., digital ; $c 24 cm.
490 1 $a Springer series in advanced microelectronics, $x 1437-0387 ; $v v.44
650 0 $a Microelectromechanical systems. $3 567138
650 0 $a Metal oxide semiconductors, Complementary. $3 649504
650 0 $a Polycrystals. $3 814677
650 1 4 $a Physics. $3 516296
650 2 4 $a Electronic Circuits and Devices. $3 1245773
650 2 4 $a Circuits and Systems. $3 896527
650 2 4 $a Optical and Electronic Materials. $3 891120
650 2 4 $a Nanotechnology and Microengineering. $3 1005737
650 2 4 $a Characterization and Evaluation of Materials. $3 890988
700 1 $a De Meyer, Kristin. $3 2054429
700 1 $a Witvrouw, Ann. $3 2054430
710 2 $a SpringerLink (Online service) $3 836513
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830 0 $a Springer series in advanced microelectronics ; $v 33. $3 1565974
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