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Efficient mixed-domain analysis of e...

Li, Gang.

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Efficient mixed-domain analysis of electrostatic microelectromechanical systems (MEMS).

Record Type:	Electronic resources : Monograph/item
Title/Author:	Efficient mixed-domain analysis of electrostatic microelectromechanical systems (MEMS)./
Author:	Li, Gang.
Description:	204 p.
Notes:	Source: Dissertation Abstracts International, Volume: 64-08, Section: B, page: 4005.
Contained By:	Dissertation Abstracts International64-08B.
Subject:	Engineering, Mechanical. -
Online resource:	http://pqdd.sinica.edu.tw/twdaoapp/servlet/advanced?query=3101898

Efficient mixed-domain analysis of electrostatic microelectromechanical systems (MEMS).
Li, Gang.

Efficient mixed-domain analysis of electrostatic microelectromechanical systems (MEMS). - 204 p.

Source: Dissertation Abstracts International, Volume: 64-08, Section: B, page: 4005.

Thesis (Ph.D.)--University of Illinois at Urbana-Champaign, 2003.

Computational analysis of electrostatic MEMS requires a self-consistent solution of the coupled interior mechanical domain and the exterior electrostatic domain. Conventional methods for coupled domain analysis, such as finite element/boundary element methods (FEM/BEM), require mesh generation, mesh compatibility, re-meshing and interpolation of solution between the domains. Mesh generation can be difficult and time consuming for complex geometries. Furthermore, mesh distortion can occur for micromechanical structures that undergo large deformations. To overcome all these difficulties, we present efficient computational methods for scattered point and meshless analysis of electrostatic microelectromechanical systems (MEMS). Electrostatic MEM devices are governed by coupled mechanical and electrostatic energy domains. A self-consistent analysis of electrostatic MEMS is implemented by combining a finite cloud method (FCM) based interior mechanical analysis with a boundary cloud method (BCM) based exterior electrostatic analysis. Lagrangian descriptions are used for both mechanical and electrostatic analysis. Meshless finite cloud and boundary cloud methods combined with Lagrangian descriptions are flexible, efficient and attractive alternatives compared to conventional FEM/BEM approach for self-consistent electromechanical analysis. The proposed full Lagrangian FCM/BCM approach has been successfully applied in numerical analysis and computer-aided design of several MEMS devices such as microswitches, micro mirror devices, comb drive microactuators and a micocompressor.Subjects--Topical Terms:

783786
Engineering, Mechanical.

Efficient mixed-domain analysis of electrostatic microelectromechanical systems (MEMS).
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035 $a (UnM)AAI3101898
035 $a AAI3101898
040 $a UnM $c UnM
100 1 $a Li, Gang. $3 1278067
245 1 0 $a Efficient mixed-domain analysis of electrostatic microelectromechanical systems (MEMS).
300 $a 204 p.
500 $a Source: Dissertation Abstracts International, Volume: 64-08, Section: B, page: 4005.
500 $a Adviser: Narayan R. Aluru.
502 $a Thesis (Ph.D.)--University of Illinois at Urbana-Champaign, 2003.
520 $a Computational analysis of electrostatic MEMS requires a self-consistent solution of the coupled interior mechanical domain and the exterior electrostatic domain. Conventional methods for coupled domain analysis, such as finite element/boundary element methods (FEM/BEM), require mesh generation, mesh compatibility, re-meshing and interpolation of solution between the domains. Mesh generation can be difficult and time consuming for complex geometries. Furthermore, mesh distortion can occur for micromechanical structures that undergo large deformations. To overcome all these difficulties, we present efficient computational methods for scattered point and meshless analysis of electrostatic microelectromechanical systems (MEMS). Electrostatic MEM devices are governed by coupled mechanical and electrostatic energy domains. A self-consistent analysis of electrostatic MEMS is implemented by combining a finite cloud method (FCM) based interior mechanical analysis with a boundary cloud method (BCM) based exterior electrostatic analysis. Lagrangian descriptions are used for both mechanical and electrostatic analysis. Meshless finite cloud and boundary cloud methods combined with Lagrangian descriptions are flexible, efficient and attractive alternatives compared to conventional FEM/BEM approach for self-consistent electromechanical analysis. The proposed full Lagrangian FCM/BCM approach has been successfully applied in numerical analysis and computer-aided design of several MEMS devices such as microswitches, micro mirror devices, comb drive microactuators and a micocompressor.
590 $a School code: 0090.
650 4 $a Engineering, Mechanical. $3 783786
650 4 $a Computer Science. $3 626642
650 4 $a Engineering, Electronics and Electrical. $3 626636
690 $a 0548
690 $a 0984
690 $a 0544
710 2 0 $a University of Illinois at Urbana-Champaign. $3 626646
773 0 $t Dissertation Abstracts International $g 64-08B.
790 1 0 $a Aluru, Narayan R., $e advisor
790 $a 0090
791 $a Ph.D.
792 $a 2003
856 4 0 $u http://pqdd.sinica.edu.tw/twdaoapp/servlet/advanced?query=3101898