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Aerosol generation and charging phen...

Forsyth, Bruce Riley.

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Aerosol generation and charging phenomena in plasma-enhanced chemical vapor deposition.

Record Type:	Electronic resources : Monograph/item
Title/Author:	Aerosol generation and charging phenomena in plasma-enhanced chemical vapor deposition./
Author:	Forsyth, Bruce Riley.
Description:	270 p.
Notes:	Source: Dissertation Abstracts International, Volume: 60-08, Section: B, page: 4171.
Contained By:	Dissertation Abstracts International60-08B.
Subject:	Engineering, Mechanical. -
Online resource:	http://pqdd.sinica.edu.tw/twdaoeng/servlet/advanced?query=9944360
ISBN:	0599461195

Aerosol generation and charging phenomena in plasma-enhanced chemical vapor deposition.
Forsyth, Bruce Riley.

Aerosol generation and charging phenomena in plasma-enhanced chemical vapor deposition. - 270 p.

Source: Dissertation Abstracts International, Volume: 60-08, Section: B, page: 4171.

Thesis (Ph.D.)--University of Minnesota, 1999.

This thesis is concerned with advancing the theoretical study of the origin and acquisition of particle charge from aerosol generation. A newly designed integral mobility charge analyzer was constructed and calibrated to measure the electrical charge distribution on aerosol particles between 10 nanometer (nm) and 10 micrometer (<math> <f> <g>m</g></f> </math>m). The charge analyzer can be used in a wide variety of laboratory and industrial applications due to its broad operating range. Initially, the analyzer performance was tested by generating a variety of aerosol particles with and without neutralization by two different radioactive sources. As a result, experimental charge distributions can be compared with analytical and numerical models of spray and contact electrification related to the interface's double layer. The liquid surface can be simply modeled as a flat plate electrical capacitor with a stored dipole charge layer near the interface. Experimental research will investigate the charge state of a surface double layer using the interaction of dissolved particles. Ion interactions with a particle-liquid interface in the electrical double layer can be analyzed by measuring the aerosol charge distribution from different concentrations of salts, colloids and organic solutions.

ISBN: 0599461195Subjects--Topical Terms:

783786
Engineering, Mechanical.

Aerosol generation and charging phenomena in plasma-enhanced chemical vapor deposition.
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100 1 $a Forsyth, Bruce Riley. $3 1944449
245 1 0 $a Aerosol generation and charging phenomena in plasma-enhanced chemical vapor deposition.
300 $a 270 p.
500 $a Source: Dissertation Abstracts International, Volume: 60-08, Section: B, page: 4171.
500 $a Adviser: Benjamin Y. H. Liu.
502 $a Thesis (Ph.D.)--University of Minnesota, 1999.
520 $a This thesis is concerned with advancing the theoretical study of the origin and acquisition of particle charge from aerosol generation. A newly designed integral mobility charge analyzer was constructed and calibrated to measure the electrical charge distribution on aerosol particles between 10 nanometer (nm) and 10 micrometer (<math> <f> <g>m</g></f> </math>m). The charge analyzer can be used in a wide variety of laboratory and industrial applications due to its broad operating range. Initially, the analyzer performance was tested by generating a variety of aerosol particles with and without neutralization by two different radioactive sources. As a result, experimental charge distributions can be compared with analytical and numerical models of spray and contact electrification related to the interface's double layer. The liquid surface can be simply modeled as a flat plate electrical capacitor with a stored dipole charge layer near the interface. Experimental research will investigate the charge state of a surface double layer using the interaction of dissolved particles. Ion interactions with a particle-liquid interface in the electrical double layer can be analyzed by measuring the aerosol charge distribution from different concentrations of salts, colloids and organic solutions.
520 $a However, the main thesis research goal is to monitor charged contaminants in process exhaust using the developed integral mobility charge analyzer. Experimental measurements can then be correlated with the dynamic behavior of different nucleated species in the reactor. Hypothetically, particles formed in the plasma volume will have a different charge and size distribution than exhaust line particles originating from unreacted gas species in the pump line. A thorough understanding of the charge level of particles within the plasma volume is necessary to understand the charging, trapping and behavior of contaminant species in the CVD film processes. Charge neutralization by free ion attachment in the exhaust lines must be investigated to describe the contaminant charge after exiting the plasma volume. In addition, particle number concentration and size distributions may be compared to models of aerosol coagulation from the nucleated particles during vacuum transport. Theoretical models can be corrected for the effect of Coulombic repulsion between charged particles.
590 $a School code: 0130.
650 4 $a Engineering, Mechanical. $3 783786
650 4 $a Physics, Fluid and Plasma. $3 1018402
650 4 $a Engineering, Environmental. $3 783782
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690 $a 0759
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710 2 0 $a University of Minnesota. $3 676231
773 0 $t Dissertation Abstracts International $g 60-08B.
790 1 0 $a Liu, Benjamin Y. H., $e advisor
790 $a 0130
791 $a Ph.D.
792 $a 1999
856 4 0 $u http://pqdd.sinica.edu.tw/twdaoeng/servlet/advanced?query=9944360