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半導體電漿製程的錯誤診斷與預測 = = Analysis of the...

吳秉翰

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半導體電漿製程的錯誤診斷與預測 = = Analysis of the time series and multi-variate model for fault detection and prediction in the semiconductor plasma using wider range of spectrum as multi-sensor : 時間序列的光譜多變數模型與分析 /

Record Type:	Language materials, printed : Monograph/item
Title/Author:	半導體電漿製程的錯誤診斷與預測 = / 吳秉翰撰
Reminder of title:	Analysis of the time series and multi-variate model for fault detection and prediction in the semiconductor plasma using wider range of spectrum as multi-sensor : 時間序列的光譜多變數模型與分析 /
remainder title:	Analysis of the time series and multi-variate model for fault detection and prediction in the semiconductor plasma using wider range of spectrum as multi-sensor
Author:	吳秉翰
Published:	[花蓮縣] : 國立東華大學電機工程學系, : 民94[2005],
Description:	11,94面 : 圖,表 ; 30公分
Notes:	指導教授︰陳炳宏
Subject:	時間序列 -
Online resource:	http://134.208.10.124/ETD-db/ETD-search-c/view_etd?URN=etd-0722105-124331PDF全文

半導體電漿製程的錯誤診斷與預測 = = Analysis of the time series and multi-variate model for fault detection and prediction in the semiconductor plasma using wider range of spectrum as multi-sensor : 時間序列的光譜多變數模型與分析 /
吳秉翰

半導體電漿製程的錯誤診斷與預測 = Analysis of the time series and multi-variate model for fault detection and prediction in the semiconductor plasma using wider range of spectrum as multi-sensor : 時間序列的光譜多變數模型與分析 / Analysis of the time series and multi-variate model for fault detection and prediction in the semiconductor plasma using wider range of spectrum as multi-sensor吳秉翰撰 - [花蓮縣] : 國立東華大學電機工程學系, 民94[2005] - 11,94面 : 圖,表 ; 30公分

指導教授︰陳炳宏

碩士論文--國立東華大學電機工程學系,2005

參考書目︰面80-83Subjects--Topical Terms:

2428245
時間序列

半導體電漿製程的錯誤診斷與預測 = = Analysis of the time series and multi-variate model for fault detection and prediction in the semiconductor plasma using wider range of spectrum as multi-sensor : 時間序列的光譜多變數模型與分析 /
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